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1.1 Ïîíÿòèå î Ð-N ïåðåõîäå
Îñíîâíûì ýëåìåíòîì áîëüøîé ãðóïïû ïîëóïðîâîäíèêîâûõ ïðèáîðîâ ÿâëÿåòñÿ ýëåêòðîííî-äûðî÷íûé ïåðåõîä. Òàêîé ïåðåõîä ïðåäñòàâëÿåò ñîáîé îáëàñòü ìåæäó äâóìÿ ïîëóïðîâîäíèêàìè ðàçíîãî òèïà ïðîâîäèìîñòè, îáúåäèíåííóþ îñíîâíûìè íîñèòåëÿìè çàðÿäà.  çàâèñèìîñòè îò õàðàêòåðà ðàñïðåäåëåíèÿ, êîíöåíòðàöèè ïðèìåñè â îáúåäèíåíîì ñëîå P-N ïåðåõîäû áûâàþò ñòóïåí÷àòûå (ðåçêèìè) è ïëàâíûìè.
 ñòóïåí÷àòîì P-N ïåðåõîäå êîíöåíòðàöèè ïðèìåñåé ðàñïðåäåëåíû â êàæäîé îáëàñòè ðàâíîìåðíî, à ïëàâíûõ ðàñïðåäåëÿþòñÿ ïî íåêîòîðîìó çàêîíó.
Íà ðèñ.1.1.1 ïðåäñòàâëåíî ðàñïðåäåëåíèå çàðàäîâ â ïîëóïðîâîäíèêàõ ïðè ïëàâíîì è ðåçêîâ èçìåíåíèè òèïà ïðîâîäèìîñòè.
à) á)
Ðèñ.1.1.1 Ðàñïðåäåëåíèå è ïðèìåñè çàðÿäà â ïîëóïðîâîäíèêå ïðè èçìåíåíèè òèïà ïðîâîäèìîñòè:
à) ïëàâíîå èçìåíåíèå òèïà ïðîâîäèìîñòè;
á) ðåçêîå èçìåíåíèå òèïà ïðîâîäèìîñòè.
Ïðè ïëàâíîì èçìåíåíèèè òèïà ïðîâîäèìîñòè (ðèñ. 1.1.1à) ãðàäèåíò êîíöåíòðàöèè ðåçóëüòèðóþùåé ïðèìåñè N=Na-Ngìàë, ñîîòâåòñòâåííî ìàëû è äèôôóçèîííûå òîêè.
Ýòè òîêè êîíïåíñèðóþòñÿ äðåéôîâûìè òîêàìè, êîòîðûå âûçâàíû ýëåêòðè÷åñêèì ïîëåì, ñâÿçàííûå ñ íàðóøåíèåì óñëîâèÿ ýëåêòðè÷åñêîé íåéòðàëüíîñòè: Ng-Na-Ro+Ïo=0 (1).
Äëÿ êîìïåíñàöèè äèôôóçèîííûõ òîêîâ äîñòàòî÷íî íåçíà÷èòåëüíîãî íàðóøåíèÿ íåéòðàëüíîñòè, è óñëîâèå (1) ìîæíî ñ÷èòàòü ïðèáëèæåííî âûïîëíåííûì: Ng-Na+Po-Ïî<<Po+Ïî (2).
Ïðè ðåçêîì èçìåíåíèè òèïà ïðîâîäèìîñòè (Ðèñ.1.1.1á) äèôôóçèîííûå òîêè âåëèêè, è äëÿ èõ êîìïåíñàöèè íåîáõîäèìî ñóùåñòâåííîå íàðóøåíèå ýëåêòðîíåéòðàëüíîñòè: (1).
Èçâåñòíî, ÷òî ýêðàíèðîâàíèå ýëåêòðè÷åñêèõ çàðÿäîâ â ïîëóïðîâîäíèêàõ ïîäâèæíûìè íîñèòåëÿìè îñóùåñòâëÿåòñÿ â îáëàñòè ñ ðàçìåðàìè ïîðÿäêà äåáàåâñêîé äëèíû ýêðàíèðîâàíèÿ(3), ãäå .
Ïðè ýòîì ýëåêòðèÿ÷åñêàÿ íåéòðàëüíîñòü ñóùåñòâåííî íàðóøàåòñÿ, åñëè íà äåáàåâñêîé äëèíå ýêðàíèðîâàíèÿ èçìåíåíèå ðåçóëüòèðóþùåé êîíöåíòðàöèè ïðèìåñè âåëèêî.
Òàêèì îáðàçîì, íåéòðàëüíîñòü ñóùåñòâåííî íàðóøàåòñÿ ïðè óñëîâèè:(4).
 ñîñòîÿíèè òåðìîäèíàìè÷åñêîãî ðàâíîâåñèÿ ïðè îòñóòñòâèè âûðîæäåíèÿ ñïðàâåäëèâ çàêîí äåéñòâóþùèõ ìàññ: (5).
Ïðè óñëîâèè (5) ïðàâàÿ ÷àñòü (4) äîñòèãàåò ìèíèìóìà ïðè .Ïîýòîìó óñëîâèå ñóùåñòâîâàíèÿ Ð-N ïåðåõîäà (óñëîâèå ñóùåñòâåííîãî íàðóøåíèÿ íåéòðàëüíîñòè) èìååò âèä: (6), ãäå - äåáàåâñêàÿ äëèíà ýêðàíèðîâàíèÿ â ñîáñòâåííîì ïîëóïðîâîäíèêå.
Ïåðåõîäû, â êîòîðûõ èçìåíåíèå êîíöåíòðàöèè ïðèìåñè íà ãðàíèöå ñëîåâ Ð- è N- òèïà ìîãóò ñ÷èòàòüñÿ ñêà÷êîîáðàçíûìè (), íàçûâàþòñÿ ñòóïåí÷àòûìè.
 ïëàâíûõ ïåðåõîäàõ ãðàäèåíò êîíöåíòðàöèè ïðèìåñè êîíå÷åí, íî óäîâëåòâîðÿåò íåðàâåíñòâó (6).
Ïðàêòè÷åñêè ñòóïå÷àòûìè ìîãóò ñ÷èòàòüñÿ P-N ïåðåõîäû, â êîòîðûõ èçìåíåíèå êîíöåíòðàöèè ïðèìåñè ïðîèñõîäèò ïî äëèíå, ìíîãî ìåíüùå øèðèíû ïåðåõîäà. Òàêèå ïåðåõîäû ìîãóò áûòü ïîëó÷åíû ïóòåì ñïëàâëåíèÿ, ýïèòàêèè.
Ïî îòíîøåíèþ ê êîíöåíòðàöèè îñíîâíûõ íîñèòåëåé â ñëîÿõ Ð- è N- òèïà ïåðåõîäû äåëÿòñÿ íà ñèììåòðè÷íûå ì íåñèììåòðè÷íûå.
 ñèììåòðè÷íûõ ïåðåîäàõ ôóíêöèè N(x) îáëàäàåò öåíòðàëüíîé ñèììåòðèåé îòíîñèòåëüíî òî÷êè X=0, ãäå N=0.
 íåñèììåòðè÷íûõ P-N ïåðåõîäàõ îëåå ëåãèðîâàííûå (è, ñîîòâåòñòâåííî , íèçêîîìíûå) îáëàñòü íàçûâàåòñÿ ýìèòåðîì, à ìåíåå ëåãèðîâàííàÿ (âûñîêîîìíàÿ) - áàçîé.
1.2 Ñòðóêòðóðà P-N ïåðåõîäà.
Íàèáîëåå
ïðîñòî
ïîääàþòñÿ
àíàëèçó
ñòóïåí÷àòûå
P-N ïåðåõîäû.
Ñòðóêòðóðà
ñòóïåí÷àòîãî
ïåðåõîäà
ïðåäñòàâëåíà
íà ðèñóíêå 1.2.1
Ïðàêòè÷åñêè
âñå
êîíöåíòðàöèè
ïðèìåñè â P- è
N-îáëàñòÿõ
ïðåâûøàþò
ñîáñòâåííóþ
êîíöåíòðàöèþ
íîñèòåëåé
çàðÿäà Ni. Äëÿ
îïðåäåëåíèÿ
áóäåì
ïîëîãàòü,
÷òî
ýìèòåðîì
ÿâëÿåòñÿ
P-îáëàñòü, à
áàçîé
N-îáëàñòü. Â
áîëüøèíñòâå
ïðàêòè÷åñêèõ
ñëó÷àåâ
âûïîëíÿåòñÿ
íåðàâåíñòâî
Ný>>Ná (7), ãäå Ný è
Ná -
ðåçóëüòèðóþùèå
êîíöåíòðàöèè
ïðèìåñè â
ýìèòåðå è
áàçå.
à) á)
Ðèñ.1.2.1 Ðàñïðåäåëåíèå ïðèìåñè è íîñèòåëåé çàðÿäà â ñòóïåí÷àòîì P-N ïåðåõîäå:
à) ïîëóëîãàðèôìè÷åñêèé ìàñøòàá
á) ëèíåéíûé ìàñøòàá
Ðèñóíîê 1.2.1 ñîîòâåòñòâóåò êðåìíèåâîìó ïåðåõîäó (Ni=1010 cm3 ïðè êîìíàòíîé òåìïåðàòóðå Ò=293,15 Ê) ñ êîíöåíòðàöèåé ïðèìåñè Ný=1018 ñì-3 Ná=1016 ñì-3.
 ãëóáèíå ýìèòåðà è áàçû êîíöåíòðàöèÿ îñíîâíûõ íîñèòåëåé çàðÿäà ïðàêòè÷åñêè ñîâïàäàåò ñ ðåçóëüòèðóþùåé êîíöåíòðàöèåé ïðèìåñè: (8),
à êîíöåíòðàöèÿ íå îñíîâíûõ íîñèòåëåé îïðåäåëÿåòñÿ çàêîíîì äåéñòâóþùèõ ìàññ (9à)
(9á).
Èíäåêñû P è Ï ñîîòâåòñòâóþò Ð è N îáëàñòÿì, à èíäåêñ Î ñîîòâåòñòâåííî òåðìîäèíàìè÷åñêîãî ðàâíîâåñèÿ. Ñëåäóåò îòìåòèòü, ÷òî êîíöåíòðàöèÿ íåîñíîâíûõ íîñèòåëåé â áàçå áîëøå ÷åì â ýìèòåðå.
Íà ðèñ. 1.2.1à ðàñïðåäåëåíèå ïðèìåñåé è íîñèòåëåé çàðÿäà ïðåäñòàâëåíî â ïîëóëîãàðèôìè÷åñêîì ìàñøòàáå, òàêà êàê â ëèíåéíîì ìàñøòàáå èçîáðàçèòü êîíöåíòðàöèè íåîñíîâíûõ íîñèòåëåé î÷åíü òðóäíî.
Ïåðåõîä çàíèìàåò îáëàñòü . Êîíå÷íî ãðàíèöû ïåðåõîäà îïðåäåëåíû â íåêîòîðîé ñòåïåíè óñëîâíî, òàê êàê êîíöåíòðàöèè îñíîâíûõ íîñèòåëåé èçìåíÿþòñÿ ïëàâíî. Òåì íåìåíåå èç ðèñóíêà âèäíî, ÷òî óæå íà íåáîëüøîì ðàñòîÿíèè îò ãðàíèö âíóòðè ïåðåõîäà âûïîëíÿåòñÿ íåðàâåíñâî:
(10).
Íåðàâåíñòâî (10) âûïîëíÿåòñÿ íà âñåì P-N ïåðåõîäå. Íà ðèñóíêå 1.2.1á ðàñïðåäåëåíèå êîíöåíòðàöèè íîñèòåëåé è ïðèìåñåé çàðÿäà èçîáðàæåíû â ëèíåéíîì ìàñøòàáå. Èç ðèñóíêà âìäíî, ÷òî â ýìèòåðíîé îáëàñòè ïåðåõîäà () êîíöåíòðàöèÿ ïîäâèæíûõ íîñèòèèëåé î÷åíü ìàëà ïî ñðàâíåíèþ ñ êîíöåíòðàöèåé ïðèìåñè.
Ýòà îáëàñòü èìååò îòðèöàòåëüíûé îáúåìíûé çàðÿä, ïëîòíîñòü êîòîðãî íå çàâèñèò îò êîðäèíàòû: (11).
 áàçîâîé îáëàñòè ïåðåõîäà () ïëîòíîñòü îáúåìíîãî çàðÿäà ïîëîæèòåëüíà: (12).
Äëÿ N-îáëàñòè îñíîâíûìè íîñèòåëÿìè ÿâëÿþòñÿ ýëåêòðîíû, äëÿ Ð-îáëàñòè - äûðêè. Îñíîâíûå íîñèòåëè âîçíèêàþò ïî÷òè öåëèêîì âñëåäñòâèè èîíèçàöèè äîíîðíûõ è àêöåïòîðíûõ ïðèìåñåé.
Ïîìèìî îñíîâíûõ íîñèòåëåé ýòè îáëàñòè ñîäåðæàò íåîñíîâíûå íîñèòåëè: N-îáëàñòè - äûðêè (), Ð-îáëàñòü - ýëåêòðîíû (). Èõ êîíöåíòðàöèþ ìîæíî îïðåäåëèòü ïîëüçóÿñü çàêîíîì äåéñòâóþùèõ ìàññ:
è Ï=1019ì-3 (Ge) ïîëó÷àåì
Òàêèì
îáðàçîì,
êîíöåíòðàöèÿ
äûðîê â
Ð-îáëàñòè íà
øåñòü
ïîðÿäêîâ
âûøå
êîíöåíòðàöèè
èç â
N-îáëàñòè,
òî÷íî òàêæå
êîíöåíòðàöèÿ
ýëåêòðîíîâ â
N-îáëàñòè íà
øåñòü
ïîðÿäêîâ
âûøå èõ
êîíöåíòðàöèè
â Ð-îáëàñòè.
Òàêîå
ðàçëè÷èå â
êîíöåíòðàöèè
îäíîòèïíûõ
íîñèòåëåé â
êîíòàêòèðóþùèõ
îáëàñòÿõ
ïîëóïðîâîäíèêà
ïðèâîäèò ê
âîçíèêíîâåíèþ
äèôôóçèîííûõ
ïîòîêîâ
ýëåêòðîíîâ
èç N-îáëàñòè
â Ð-îáëàñòü è
äûðîê èç
Ð-îáëàñòè â
N-îáëàñòü. Ïðè
ýòîì
ýëåêòðîíû,
ïåðåøåäøèå
èç N-îáëàñòè
â Ð-îáëàñòü,
ðåêîìáèíèðóþò
âáëèçè
ãðàíèöû
ðàçäåëà ñ
äûðêàìè
Ð-îáëàñòè,
òî÷íî òàêæå
äûðêè,
ïåðåøåäøèå
èç Ð- â
N-îáëàñòü,
ðåêîìáèíèðóþò
çäåñü ñ
ýëåêòðîíàìè
ýòîé
îáëàñòè. Â
ðåçóëüòàòå
ýòîãî â
ïðèêîíòàêòíîì
ñëîå
N-îáëàñòè
ïðàêòè÷åñêè
íå îñòàåòñÿ
ñâîáîäíûõ
ýëåêòðîíîâ è
â íåì
ôîðìèðóåòñÿ
íåïîäâèæíûé
îáúåìíûé
çàðÿä. Òàêèì
îáðàçîì
ôèçè÷åñêàÿ
ïðè÷èíà
îáðàçîâàíèÿ
îáúåìíîãî
çàðÿäà
çàêëþ÷àåòñÿ
â òîì, ÷òî ïîä
äåéñòâèåì
ãðàäèåíòà
êîíöåíòðàöèè
äûðêè è
ýëåòðîíû
äèôôóíäèðóþò
èç
Ð-îáëàñòè(ýìèòòåðà)
â N-îáëàñòü
(áàçó) è èç
N-îáëàñòè
(áàçû) â
Ð-îáëàñòü
(ýìèòåðà)
ñîîòâåòñòâåííî,
îñòàâëÿÿ â Ð-N
ïåðåõîäå
îãîëåííûå
ïðèìåñíûå
èîíû. Ïðîöåññ
äèôôóçèè
ïðîäîëæàåòñÿ
äî òåõ ïîð,
ïîêà íå
óðàâíîâåøèâàþòñ
âîçíèêàþùèì
ýëåêòðè÷åñêèì
ïîëåì.
Íà ðèñ. 1.2.2á ïîêàçàíî èçìåíåíèå êîíöåíòðàöèè àêöåïòîðíûõ è äîíîðíûõ àòîìîâ ïðè ïåðåìåùåíèè âäîëü îñè Õ, ïåðïåíäèêóëÿðíîé ïëîñêîñòè.
Íåïîäâèæíûå îáúåìíûå çàðÿäû ñîçäàþò â Ð-N ïåðåõîäå êîíòàêòíîå ýëåêòðè÷åñêîå ïîëå ñ ðàçíîñòüþ ïîòåíöèàëîâ , ëîêàëèçîâàííîå â îáëàñòè ïåðåõîäà è ïðàêòè÷åñêè íå âûõîäÿùèå çà åãî ïðåäåëû.
Ïîýòîìó âíå ýòîãî ñëîÿ, ãäå ïîëÿ íåò, ñâîáîäíûå íîñèòåëè çàðÿäà ïî ïðåæíåìó õîîòè÷íî è ÷èñëî íîñèòåëåé, åæåñåêóíäíî íàòàëêèâàþòñÿ íà ñëîé îáúåìíîãî çàðÿäà, çàâèñèò òîëüêî îò èõ êîíöåíòðàöèè è ñêîðîñòè òåïëîâîãî äâèæåíèÿ, êîòîðûå ïîä÷èíÿþòñÿ êëàññè÷åñêîé ñòàòèñòèêå Ìàêñâåëëà-Áîëüöìàíà.
Íà ðèñ 1.2.2â, ïîêàçàíû íåïîäâèæíûå îáúåìíûå çàðÿäû, îáðàçîâàâøèåñÿ â Ð- ïåðåõîäå ( - îáúåìíàÿ ïëîòíîñòü ýòèõ çàðÿäîâ).
Íå îñíîâíûå íîñèòåëè-ýëåêòðîíû èç Ð-îáëàñòè è äûðêè èç -îáëàñòè, ïîïàäàÿ â ñëîé îáúåìíîãî çàðÿäà (ðèñ.1.2.2) ïîäõâàòûâàþòñÿ êîíòàêòíûì ïîëåì Vk è ïåðåíîñÿòñÿ ÷åðåç Ð-N ïåðåõîä.
Äðóãèå óñëîâèÿ ñêëàäûâàþòñÿ äëÿ îñíîâíûõ íîñèòåëåé. Ïðè ïåðåõîäå èç îäíîé îáëàñòè ïîëóïðîâîäíèêà â äðóãóþ îíè äîëæíû ïðåîäîëåâàòü ïîòåíöèàëüíûé áàðüåð , ñôîðìèðîâàâøèéñÿ â Ð-N ïåðåõîäå. Äëÿ ýòîãî îíè äîëæíû îáëàäàòü êèíåòè÷åñêîé ýíåðãèåé äâèæåíèÿ âäîëü îñè Õ, íå ìåíüøåé .
Ðèñ.1.2.2
Íà ïåðâûõ ïîðàõ, ïîñëå ìûñëåíîãî ïðèâåäåíèÿ Ð- è N-îáëàñòåé â êîíòàêò ïîòîêè îñíîâíûõ íîñèòåëåé ðåçêî óìåíüøàþòñÿ. Â òîæå âðåìÿ ïîòîêè íåîñíîâíûõ íîñèòåëåé íåçàâèñÿùèå îò îñòàþòñÿ íåèçìåííûìè. Ïîýòîìó îòíîñèòåëüíî áûñòðî ïîòåíöèàëüíûé áàðüåð äîñòèãàåò òàêîé âûñîòû , ïðè êîòîðîì ïîòîêè îñíîâíûõ íîñèòåëåé ñðàâíèâàþòñÿ ñ ïîòîêàìè íåîñíîâíûõ íîñèòåëåé:
Ýòî ñîîòâåòñòâóåò óñòàíîâëåíèþ â Ð-N ïåðåõîäå ñîñòîÿíèÿ äèíàìè÷åñêîãî ðàâíîâåñèÿ.
Èç ðèñ.2à âèäíî ÷òî â íåêîòîðîé îáëàñòè Õ=Õô êîíöåíòðàöèÿ ýëåêòðîíîâ è äûðîê îäèíàêîâû:
(13).
Ýòà ïëîñêîñòü íàçûâàåòñÿ ïëîñêîñòüþ ôèçè÷åñêîãî ïåðåõîäà â îòëè÷èå îò ïëîñêîñòè ìåòàëëóðãè÷åñêîãî (èëè òåõíîëîãè÷åñêîãî) ïåðåõîäà Õ=0, ãäå ðåçóëüòèðóþùàÿ êîíöåíòðàöèÿ ïðèìåñè ðàâíà íóëþ.  ñèììåòðè÷íûõ ïåðåõîäàõ ïëîñêîñòü ôèçè÷åñêîãî è ìåòàëëóðãè÷åñêèõ ïåðåõîäîâ ñîâïàäàåò.
1.3. Ìåòîäû ñîçäàíèÿ Ð-N ïåðåõîäîâ.
Ýëåêòðîííî-äûðî÷íûå ïåðåõîäû â çàâèñèìîñòè îò òåõíîëîãèè èçãîòîâëåíèÿ ðàçäåëÿþòñÿ íà òî÷å÷íûå, ñïëàâíûå, äèôôóçèîííûå, ýïèòàêñèàëüíûå, ïëàíàðíûå è äðóãèå.
Òî÷å÷íûå ïåðåõîäû (ðèñ. 1.3.1)
Îáðàçóþòñÿ òî÷å÷íî-êîíòàêòíûì ñïîñîáîì. Ê ïîëèðîâàííîé è ïðîòðàâëåííîé ïëàñòèíå ìîíîêðèñòàëè÷åñêîãî ïîëóïðîâîäíèêà N-òèïà ïîäâîäÿò èãëó, íàïðèìåð, èç áåðèëëèåâîé áðîíçû ñ îñòðèåì 20-30 ìêì. Çàòåì ÷åðåç êîíòàêò ïðîïóñêàþò êðàòêîâðåìåííûå ìîùíûå èìïóëüñû òîêà. Ìåñòî êîíòàêòà ðàçîãðåâàåòñÿ äî òåìïåðàòóðû ïëàâëåíèÿ ìàòåðèàëà çîíäà, è ìåäü ëåãêî äèôôóíäèðóåò âíóòðü ïîëóïðîâîäíèêà îáðàçóÿ, ïîä çîíäîì íåáîëüøóþ ïî îáúåìó îáëàñòü Ð-òèïà.
Ðèñ.1.3.1 Òî÷å÷íûé ïåðåõîä
Èíîãäà ïåðåä ýëåêòðè÷åñêîé ôîðìîâêîé íà êîíåö èãëû íàíîñÿò àêöåïòîðíóþ ïðèìåñü (In èëè Al), ïðè ýòîì ïðÿìàÿ ïðîâîäèìîñòü êîíòàêòà äîõîäèò äî 0,1 Ñì. Òàêèì îáðàçîì, ýëåêòðîííî-äûðî÷íûé ïåðåõîä îáðàçóåòñÿ â ðåçóëüòàòå äèôôóçèè àêöåïòîðíîé ïðèìåñè èç ðàñïëàâà çîíäà è âîçíèêíîâåíèè ïîä íèì îáëàñòè Ð-òèïà â êðèñòàëëè÷åñêîé ðåøåòêå ïîëóïðîâîäíèêà N-òèïà.
Òî÷å÷íûå ïåðåõîäû ïðèìåíÿþò ïðè èçãîòîâëåíèè âûñîêîêà÷åñòâåííûõ äèîäîâ äëÿ ðàäèîòåõíè÷åñêîãî îáîðóäîâàíèÿ.
Ñïëàâíûå ïåðåõîäû.(ðèñ.1.3.2)
Îáû÷íî
ïîëó÷àþò
âûïëàâëåíèåì
ïðèìåñè â
ìîíîêðèñòàëë
ïîëóïðîâîäíèêà.
Ìîíîêðèñòàëë,
íàïðèìåð
ãåðìàíèÿ
N-òèïà,
ðàñïèëèâàþò
íà ïëàñòèíû
òîëùèíîé 200-400
ìêì è çàòåì
ïîñëå
òðàâëåíèÿ è
ïîëèðîâêè
ðàçðåçàþò
íà
êðèñòàëëû
ïëîùàäüþ â
äâà-òðè
ìèëëèìåòðà
è áîëüøå. íà
êðèñòàëëû,
ïîìåùåííûå
â
ãðàôèòîâûå
êàññåòû,
íàêëàäûâàþò
òàáëåòêó
àêöåïòîðíîãî
ìàòåðèàëà,
÷àùå âñåãî
èíäèÿ. Çàòåì
êàññåòà
ïîìåùàåòñÿ
â âàêóóìíóþ
ïå÷ü, â
êîòîðîé
òàáëåòêà
èíäèÿ è ñëîé
ãåðìàíèÿ ïîä
íåé
ðàñïëàâëÿåòñÿ.
Íàãðåâ
ïðåêðàùàåòñÿ
è ïðè
îõëàæäåíèè
ãåðìàíèé
êðèñòàëèçóåòñÿ,
îáðàçóÿ ïîä
ñëîåì èíäèÿ
ñëîé Ð-òèïà.
Ðèñ.1.3.2 Ñïëàâíîé ïåðåõîä
Çàñòûâøàÿ ÷àñòü èíäèÿ ïðåäñòàëÿåò ñîáîé îìè÷åñêèé (íåâûïðÿìëÿþùèé) êîíòàêò, íà íèæíþþ ÷àñòü ïëàñòèíû íàíîñÿò ñëîé îëîâà, êîòîðûé ñëóæèò îìè÷åñêèì êîíòàêòîì ê ãåðìàíèþ N-òèïà. Ê èíäèþ è îëîâó ïðèïàèâàþò âûâîäû îáû÷íî èç íèêåëåâîé ïðîâîëî÷êè.
Èíîãäà, äëÿ îáðàçîâàíèÿ îìè÷åñêîãî êîíòàêòà ñ îáëàñòüþ N-òèïà, íà íåå íàïûëÿþò ñïëàâ Au-Sb, ñîäåðæàùèé ïðèìåðíî 0,1% ñóðüìû, è âïëàâëÿþò åãî ïðè òåìïåðàòóðå 400îÑ.
Ðèñ. 1.3.3. Äèôôóçèîííûé ïåðåõîä
Äèôôóçèîííûå ïåðåõîäû (ðèñ. 1.3.3)
Äèôôóçèîííûå ïåðåõîäû ïîëó÷àþò äèôôóçèåé ïðèìåñíîãî âåùåñòâà â èñõîäíóþ ïîëóïðîâîäíèêîâóþ ïëàñòèíó. Ýòî îäèí èç íàèáîëåå øèðîêî èñïîëüçóåìûõ ìåòîäîâ ïîëó÷åíèÿ Ð-N ïåðåõîäà. Îí èìååò íåñêîëüêî ðàçíîâèäíîñòåé.
Ïðè ïëàíàðíîì ìåòîäå äèôôóçèè ïåðåõîäû ïîëó÷àþò, èñïîëüçóÿ èçîëèðóþùèé ñëîé, ïðèïÿòñòâóþùèé äèôôóçèè ïðèìåñåé. Íà ïîâåðõíîñòè êðåìíèÿ N-òèïà âûðàùèâàåòñÿ òîíêèé (îêîëî 3 ìêì) ñëîé äâóîêèñè êðåìíèÿ SiO2 (ðèñ.1.3.3à). Ôîòîëèòîãðàôè÷åñêèì ìåòîäîì â îïðåäåëåííûõ ìåñòàõ îêèñëà ïîëó÷àþò “îêíà”, ÷åðåç êîòîðûå äèôôóíäèðóþùèå ïðèìåñè ïðîíèêàþò â N-ñëîé, îáðàçóÿ ïåðåõîä (ðèñ.1.3.3á,â)
Ýïèòàêñèàëüíûå ïåðåõîäû (Ðèñ.1.3.4)
Ðèñ. 1.3.4 Ýïèòàêñèàëüíûé ïåðåõîä
Ýïèòàêñèàëüíûå ïåðåõîäû îáðàçóþòñÿ îðèåíòèðîâàííûì íàïðàâëåíèåì ñëîÿ ìîíîêðèñòàëè÷åñêîãî ïîëóïðîâîäíèêà íà èñõîäíîì ìîíîêðèñòàëëå-ïîäëîæêå. Äëÿ ïðîâåäåíèÿ ýïèòàêñèè íåîáõîäèìî ñîçäàâàòü óñëîâèÿ äëÿ êîíäåíñàöèè àòîìîâ îñàæäàåìîãî âåùåñòâà íà ïîâåðõíîñòü ïîäëîæêè. Êîíäåíñàöèÿ ïðîèñõîäèò èç ïåðåñûùåíîãî ïàðà èëè æèäêîãî ðàñòâîðà, à òàêæå ïðè èñïàðåíèè îñàæäàåìîãî âåùåñòâà â âàêóóìå â ñïåöìàëüíûõ ðåàêòîðàõ. Ïðè íàðàùèâàíèè ïëåíêè ñ ïðîâîäèìîñòüþ ïðîòèâîïîëîæíîé ïîäëîæêå, îáðàçóåòñÿ Ð-N ïåðåõîä.
Ïëàíàðíî-ýïèòàêñèàëüíûé ïåðåõîä.(Ðèñ.1.3.5)
Ïðè
èçãîòîâëåíèè
èíòåãðàëüíûõ
ñõåì øèðîêî
èñïîëüçóþò
ïëàíàðíî-ýïèòàêñèàëüíûé
ìåòîä.
îñîáåííîñòü
òàêîãî
òåõíîëîãè÷åñêîãî
ïðîöåññà
çàêëþ÷àåòñÿ
â òîì, ÷òî
ïóòåì
íàðàùèâàíèÿ
íà ïîäëîæêó [4]
èç
íèçêîîìíîíîãî
êðåìíèÿ
òîíêîãî
ñëîÿ [3]
âûñîêîîìíîãî
ïîëóïðîâîäíèêà,
ïîâòîðÿþùåãî
ñòðóêòóðó
ïîäëîæêè.
Ýòîò ñëîé,
íàçûâàåìûé
ýïèòàêñèàëüíûì,
ïîêðûâàþò
ïëîòíîé
çàùèòíîé
ïëåíêîé SiO2
òîëùèíîé
1ìêì (ðèñ.8). Â
ïëåíêå
ïðîòðàâëèâàþò
îêíî, ÷åðåç
êîòîðîå
ïóòåì
äèôôóçèè
áîðà èëè
àëëþìèíèÿ
ñîçäàåòñÿ Ð-N
ïåðåõîä [1],
âûõîä
êîòîðîãî íà
ïîâåðõíîñòü
îêàçûâàåòñÿ
ñðàçó æå
íàäåæíî
çàùèùåííûì
ïëåíêîé
îêèñëà.
Ðèñ. 1.3.5 Ïëàíàðíî ýïèòàêñèàëüíûé ïåðåõîä
Ñëåäóåò îòìåòèòü, ÷òî â ïîñëåäíèå ãîäû øèðîêîå ðàñïðîñòðàíåíèå ïîëó÷èëè òàêèå ìåòîäû ôîðìèðîâàíèÿ Ð-N ïåðåõîäîâ, êàê èîííîå ëåãèðîâàíèå è ìîëåêóëÿðíî-ëó÷åâàÿ ýïèòàêñèÿ.
1.4 Ýíåðãåòè÷åñêàÿ äèàãðàììà Ð-N ïåðåõîäà.
Äëÿ àíàëèçà ôèçè÷åñêèõ ïðîöåññîâ â ïîëóïðîâîäíèêîâûõ ïðèáîðîâ óäîáíî èñïîëüçîâàòü ìåòîä ýíåðãåòè÷åñêèõ äèàãðàìì. Ýíåðãåòè÷åñêàÿ äèàãðàììà Ð-N ïåðåõîäà â ñîñòîÿíèè òåðìîäèíàìè÷åñêîãî ðàâíîâåñèÿ ïðåäñòàâëåíà íà ðèñ. 1.4.1.
Ðèñ. 1.4.1. Ýíåðãåòè÷åñêàÿ äèàãðàììà ðàâíîâåñíîãî Ð-N ïåðåõîäà.
Íà îñè êîîðäèíàò îòëîæåíà ýíåðãèÿ ýëåêòðîíà Å. Ýíåðãèÿ äûðîê íà äèàãðàììå âîçðàñòàåò â íàïðàâëåíèè -Å. Òàê êàê ÷àñòèöû ñòðåìÿòñÿ çàíÿòü ñîñòîÿíèå ñ ìèíèìàëüíîé ýíåðãèåé, ýëåêòðîíû íà äèàãðàììå èìåþò òåíäåíöèþ “òîíóòü”, à äûðêè “âñïëûâàòü”. Ïðè îòñóòñòâèè âûðîæäåíèÿ îáùèé äëÿ âñåé ñèñòåìû óðîâåíü Ôåðìè ðàñïîëîæåí âíóòðè çàïðåùåííîé çîíû, øèðèíà êîòîðîé íå çàâèñèò îò êîîðäèíàòû.
Óðîâåíü ýëåêòðîñòàòè÷åñêîé ýíåðãèè Fi ïîêàçàí íà ðèñ.1.4.1 ïóíêòèðîâ, ñîîòâåòñòâóåò ïîëîæåíèþ óðîâíÿ Ôåðìè â ñîáñòâåííîì ïîëóïðîâîäíèêå è ðàñïîëîæåí âáëèçè ñåðåäèíû çàïðåùåííîé çîíû.
Ýíåðãåòè÷åñêèå
óðîâíè
èçîáðàæåíû
ãîðèçîíòàëüíûìè
ïðÿìûìè. Ýòî
âûðàæàåò
òîò ôàêò, ÷òî
ýíåðãèÿ
ýëåêòðîíà,
íàõîäÿùåãîñÿ
íà äàííîì
óðîâíå,
íàïðèìåð, íà
äâå çîíû
ïðîâîäèìîñòè,
âî âñåõ
òî÷êàõ
ïîëóïðîâîäíèêà
îäèíàêîâà.
Ïîñëå
óñòàíîâëåíèÿ
ðàâíîâåñèÿ
îáðàçóåòñÿ
Ð-N ïåðåõîä ñ
ïîòåíöèàëüíûì
áàðüåðîì äëÿ
îñíîâíûõ
íîñèòåëåé
ðàâíûì .
Ýëåêòðîíû,
ïåðåõîäÿùèå
èç N- â
Ð-îáëàñòü,
ïðåîäîëåâàÿ
ýòîò áàðüåð,
óâåëè÷èâàåò
ñâîþ
ïîòåíöèàëüíóþ
ýíåðãèþ íà .
Ïîýòîìó âñå
ýíåðãèòè÷åñêèå
óðîâíè
ïîëóïðîâîäíèêà,
èñêðèâëÿÿñü
â îáëàñòè Ð-N
ïåðåõîäà,
ïîäíèìàþòñÿ
ââåðõ íï Åê,
êàê
ïîêàçàíî íà
ðèñ.1.4.1. Ïðè
ýòîì óðîâíè
Ôåðìè è
óñòàíàâëèâàþòñÿ
íà äàííîé
âûñîòå, êàê â
ñëó÷àå äâóõ
ìåòàëëîâ (íà
ðèñ.1.4.1-F).
 ýëåêòðè÷åñêèõ íåéòðàëüíûõ îáëàñòÿõ ýìèòòåðà () è áàçû () ïîëå ðàâíî íóëþ, è óðîâíè Åñ,Åv,Ei ðàñïîëîãàþòñÿ ãîðèçîíòàëüíî.  îáëàñòè Ð-N ïåðåõîäà () ýëåêòðè÷åñêîå ïîëå íàïðàâëåíî ñïðàâî íàëåâî (âäîëü ãðàäèåíòà Fi).
Ðàâíîâåñíàÿ êîíöåíòðàöèÿ íîñèòåëåé çàðÿäà â îòñóòñòâèè âûðîæäåíèÿ îïðåäåëÿåòñÿ âçàèìíûì ðàñïîëîæåíèåì óðîâíåé F è Fi.
 ýìèòòåðå Ð-òèïà () ôåðìèåâñêàÿ ýíåðãèÿ ìåíüøå ýëåêòðè÷åñêîé ýíåðãèè: F<Fi .
 áàçå N-òèïà: F>Fi .
 ïëîñêîñòè ôèçè÷åñêîãî ïåðåõîäà Õ-Õô âûïîëíÿåòñÿ óñëîâèå Fi(Xô)=F.
 âèäó èñêðèâëåíèÿ çàïðåùåííîé çîíû â îáëàñòè ïåðåõîäà ìåæäó ýìèòòåðîì è áàçîé ñóùåñòâóåò ýíåðãåòè÷åñêèé þàðüåð, âûñîòà êîòîðîãî ðàâíà ðàçíîñòè ýëåêòðîñòàòè÷åñêèõ ýíåðãèåé â N- è Ð-îáëàñòÿõ ðèñ.1.4.1
(16).
Ñîîòâåòñòâåííî ïîòåíöèàëû ýìèòòåðà è áàçû îòëè÷àþòñÿ íà âåëè÷èíó , ãäå - êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ.
Ýíåðãåòè÷åñêèé áàðüåð ïðåïÿòñòâóåò äèôôóçèîçíûì ïîòîêàì ýëåêòðîíîâ èç áàçû â ýìèòòåð è äûðîê - èç ýìèòòåðà â áàçó.
Âåëè÷èíà áàðüåðà àâòîìàòè÷åñêè ñòàíîâèòñÿ òàêîé, ÷òîáû òî÷íî ñêîìïåíñèðîâàòü äèôôóçèîííûå òîêè.
3. Òîêè ÷åðåç Ð-N ïåðåõîä â ðàâíîâåñíîì ñîñòîÿíèè.
Ðàññìîòðèì çîííóþ äèàãðàììó Ð-N ïåðåõîäà. Ãðàäèåíòû êîíöåíòðàöèè ïîäâèæíûõ íîñèòåëåé çàðÿäà, à òàêæå ãðàäèåíò ýëåêòðè÷åñêîãî ïîòåíöèàëà â Ð-N ïåðåõîäå âûçûâàåò ïîÿâëåíèå äèôôóçèîííûõ è äðåéôîâûõ òîêîâ ÷åðåç ïåðåõîä. Ìåõàíèçì ïðîòåêàíèÿ ýòèõ òîêîâ ñõåìàòè÷åñêè ïðåäñòàâëåí íà ðèñóíêå 1.4.1, ãäå äûðêè èçîáðàæåíû êðóæêàìè ñî çíàêîì + ýëåêòðîíû - ñî çíàêîì -.
Ïîòåíöèàëüíûé
áàðüåð
ñîçäàåò
ðàçëè÷íûå
óñëîâèÿ äëÿ
ïåðåõîäà
íîñèòåëåé â
ñìåæíûå
îáëàñòè.
Íàïðèìåð,
ýëåêòðîííûé
ñëîé N ìîæåò
ïåðåõîäèòü â
ñëîé Ð òîëüêî
â òîì ñëó÷àå,
åñëè îí
îáëàäàåò
äîñòàòî÷íîé
ýíåðãèåé äëÿ
ïðåîäîëåíèÿ
ñòóïåíè
âûñîòîé Åê,
òî åñòü åñëè
îí ñìîæåò
ïðåîäîëåòü
ñèëû
ýëåêòðè÷åñêîãî
ïîëÿ,
âûòàëêèâàþùèå
åãî èç
ïåðåõîäà
îáðàòíî â N
ñëîé. Ïåðåõîä
æå
ýëåêòðîíîâ
èç Ð-ñëîÿ â
N-ñëîé
ñîâåðøàåòñÿ
áåçïðåïÿòñòâåííî,
áîëåå òîãî,
ýëåêòðè÷åñêîå
ïîëå,
äåéñòâóþùåå
â ïåðåõîäå
ïîìîãàåò èì
(ýëåêòðîíû
êàê áû
“ñêàòûâàþòñÿ”
èç Ð-ñëîÿ). Â
ñîòîÿíèè
ðàâíîâåñèÿ
ýòè ïîòîêè
íîñèòåëåé
âçàèìíîóðàâíîâåøèâàþò
äðóã äðóãà.
Àíàëîãè÷íàÿ
ñèòóàöèÿ
ñêëàäûâàåòñÿ
â âàëåíòíîé
çîíå. Äûðêè,
÷òîáû
ïåðåéòè èç
ñëîÿ Ð â ñëîé N
äîëæíû
“îïóñòèòüñÿ”
íà ãëóáèíó
Åê. Ïîñêîëüêî
äâèæåíèå
äûðîê
âûçâàíî
ïðîòèâîïîëîæíûì
ïåðåìåùåíèåì
ýëåêòðîíîâ,
÷òîáû
ïðåîäîëåòü
áàðüåð
âûñîòîé Åê
ïðè ïåðåõîäå
èç Ð-ñëîÿ â
N-ñëîé. Òî åñòü
äûðêè,
ïåðåõîäÿùèå
èç Ð- â N-ñëîé,
äîëæíû
îáëàäàòü
ýíåðãèåé
áîëüøåé, ÷åì
ýíåðãèÿ
äåéñòâóþùåãî
â ïåðåõîäå
ýëåêòðè÷åñêîãî
ïîëÿ.
Îáðàòíîå æå
äâèæåíèå
äûðîê (èç
N-ñëîÿ â Ð-ñëîé)
ñîâåðøàåòñÿ
áåçïðåïÿòñòâåííî.
Òàêèì îáðàçîì â ðàâíîâåñíîì ñîñòîÿíèè â ïåðåõîäå ïðîòåêàåò öåëûé ðÿä ñîñòàâëÿþùèõ òîêà.
Êîíöåíòðàöèè
ýëåêòðîíîâ â
çîíå
ïðîâîäèìîñòè
N-îáëàñòè
óìåíüøàåòñÿ÷
ïî ìåðå
óâåëå÷åíèÿ
èõ ýíåðãèè
îò óðîâíÿ Åñ.
Ïîä
äåéñòâèåì
õàîòè÷åñêîãî
òåïëîâîãî
äâèæåíèÿ
ýëåêòðîíû
ìîãóò
ïîïàäàòü èç
N-îáëàñòè â Ð-N
ïåðåõîä.
Íàèìåíåå
ýíåðãè÷íûå
ýëåêòðîíû ( ñ
ýíåðãèåé
áëèçêîé Åñ)
îòðàæàþòñÿ
ïîòåíöèàëüíûì
áàðüåðîì è
âîçâðàùàþòñÿ
â N-îáëàñòü.
Áîëåå
ýíåðãè÷íûå
ýëåêòðîíû
äàëüøå
ïðîíèêàþò â
îáëàñòü
ïåðåõîäà,
îäíàêî åñëè
èõ
êèíåòè÷åñêàÿ
ýíåðãèÿ
ìåíüøå
âûñîòû
áàðüåðà Åê,
îíè òàêæå
âîçâðàùàþòñÿ
â N-îáëàñòü, íå
âûçûâàÿ
òîêà ÷åðåç
ïåðåõîä è
íàêîíåö
ýíåðãè÷íûå
ýëåêòðîíû ñ
êèíåòè÷åñêîé
ýíåðãèåé
áîëüøåé Åê,
ìîãóò
ïðåîäîëåâàòü
áàðüåð. Òàêèå
íîñèòåëè
âûçûâàþò
ïðîòèêàíèå
÷åðåç
ïåðåõðîä
äèôôóçèîííîãî
ýëåêòðîííîãî
òîêà ñ
ïëîòíîñòüþ jn
äèôî(ðèñóíîê
1.4.1),
íàïðàâëåííîãî
âäîëü îñè Õ
(ïî
íàïðàâëåíèþ
ýëåêòðîííîãî
òîêà
ïðîòèâîïîëîæíî
íàïðàâëåíèþ
ïîòîêà
ýëåêòðîíîâ).
Äèôôóçèîííûé
òîê
ïîëíîñòüþ
êîìïåíñèðóåòñÿ
âñòðå÷íûì
ïîòîêîì
ýëåêòðîíîâ
èç Ð-îáëàñòè.
 Ð-îáëàñòè
ýëåêòðîíû
ÿâëÿþòñÿ
íåîñíîâíûìè
íîñèòåëÿìè
è ñîäåðæèòñÿ
â íåáîëüøîì
êîëëè÷åñòâå.
Åñëè ïîä
äåéñòâèåì
òåïëîâîãî
äâèæåíèÿ
ýëåêòðîíû
ïîïàäàþò èç
Ð-îáëàñòè â
ïåðåõîä, îíè
ïîäõâàòûâàþòñÿ
ýëåêòðè÷åñêèì
ïîëåì
ïåðåõîäà è
ïåðåõîäÿò â
N-îáëàñòü,
âûçûâàÿ
ïðîòåêàíèå
÷åðåç
ïåðåõîä
äðåéôîâîãî
òîêà
ýëåêòðîíîâ ,
íàïðàâëåííîãî
ïðîòèâ îñè Õ
(âäîëü ïîëÿ). Â
ñîñòîÿíèè
òåðìîäèíàìè÷åñêîãî
ðàâíîâåñèÿ
äèôôóçèîííûé
è äðåéôîâûé
òîêè
ýëåêòðîíîâ â
òî÷íîòè
êîìïåíñèðóþò
äðóã äðóãà: (17).
Àíàëîãè÷íûì îáðàçîì êîìïåíñèðóþòñÿ äèôôóçèîííàÿ è äðåéôîâàÿ ñîñòàâëÿþùàÿ äûðî÷íîãî òîêà: (18).
Êðîìå
ðàññìîòðåííûõ
ìåõàíèçìîì
ïðîòåêàíèÿ
òîêîâ,
ñóùåñòâóþò
òîêè,
ñâÿçàííûå ñ
ïðîöåññàìè
òåðìîãåíåðàöèè
è
ðåêîìáèíàöèè
ýëåêòðîííî-äûðî÷íûõ
ïàð â
îáëàñòè
ïåðåõîäà.
Äûðêè è
ýëåêòðîíû,
ïðîíèêàþùèå
â ïåðåõîä ñî
ñòîðîíû Ð- è
N-îáëàñòåé
ñîîòâåòñòâåííî,
èìåþò
êîíå÷íóþ
âåðîÿòíîñòü
ðåêîìáåíèðîâàòü
â ïåðåõîäå, ñ
ýòèì
ïðîöåññîì
ñâÿçàí òîê,
ïðîòåêàþùèé
â
íàïðàâëåíèè
îñè Õ. Ñ
äðóãîé
ñòîðîíû, ïðè
òåðìîãåíåðàöèè
ýëåêòðîííî-äûðî÷íûõ
ïàð â
ïåðåõîäå
îáðàçîâàâøèåñÿ
íîñèòåëè
çàðÿäà
ïîäõâàòûâàþòñÿ
ýëåêòðè÷åñêèì
ïîëåì, ïðè÷åì
ýëåêòðîíû
ïåðåíîñÿòñÿ
â N-îáëàñòü, à
äûðêè â
Ð-îáëàñòü.
Âîçíèêàþùèé
ïðè ýòîì òîê
òåðìîãåíåðàöèè
íàïðàâëåí
ïðîòèâ îñè Õ
(âäîëü ïîëÿ) è â
òî÷íîñòè
êîìïåíñèðóåò
òîê
ðåêîìáèíàöèè:
(19).
Ñóììàðíàÿ ïëîòíîñòü òîêà ÷åðåç ïåðåõîäû â ñîñòîÿíèè ðàâåíñòâà ðàâíû íóëþ: (20).
Ñëåäóåò îòìåòèòü, ÷òî êàæäûé èç ðàññìîòðåííûõ òîêîâ èìååò ìàëóþ âåëè÷èíó.Äðåéôîâûå òîêè ìàëû ââèäó òîãî, ÷òî ïåðåíîñÿòñÿ íåîñíîâíûìè íîñèòåëÿìè â Ð- è N-îáëàñòÿõ, êîíöåíòðàöèÿ êîòîðûõ î÷åíü íèçêà.
Äèôôóçèîííûå òîêè òàêæå ìàëû ââèäó òîãî, ÷òî ïåðåíîñÿòñÿ òîëüêî íàèáîëåå ýíåðãè÷íûìè íîñèòåëÿìè ñ êèíåòè÷åñêîé ýíåðãèåé, áîëüøå âûñîòû Åê, ÷èñëî êîòîðûõ òàêæå íåâåëèêî. Òîêè ðåêîìáèíàöèè ìàëû ââèäó ìàëûõ ðàçìåðîâ Ð-N ïåðåõîäà (÷èñëî ãåíåðèðîâàííûõ ïàð ìàëî) è ìàëî âðåìåíè ïðåáûâàíèÿ íîñèòåëåé â ïåðåõîäå (÷èñëî ðåêîìáåíèðóþùèõ ïàð ìàëî).
1.5 ÌÅÒÎÄÈÊÀ ÐÀÑ×ÅÒÀ ÏÀÐÀÌÅÒÐΠÐ-N ÏÅÐÅÕÎÄÀ.
Îñíîâíûìè ïàðàìåòðàìè Ð-N ïåðåõîäà ÿâëÿþòñÿ:
-êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ ;
-øèðèíà ïåðåõîäà ;
-ìàêñèìàëüíàÿ íàïðèæåííîñòü ýëåêòðè÷åñêîãî ïîëÿ .
Íåîáõîäèìî òàêæå çíàòü ïðîòÿæåííîñòü ïåðåõîäà â N- è Ð-îáëàñòè ïî îòäåëüíîñòè() è ðàñïðåäåëåíèÿ íàïðÿæåííîñòè ýëåêòðè÷åñêîãî ïîëÿ â ïåðåõîäå .
Êîíòàêòíàÿ ðàçíîñòü ïîòåöèàëîâ ìîæåò áûòü îïðåäåëèíà ñ ïîìîùüþ ñîîòíîøåíèé:(14), (15) è (*).Ó÷èòûâàÿ, ÷òî êîíöåíòðàöèÿ íîñèòåëåé çàðÿäà íà ãðàíèöàõ ïåðåõîäà (â ïëîñêîñòÿõ õ=, õ=) ñîîòâåòñòâóåò ðàâíîâåñíûì çíà÷åíèÿì, ïîëó÷èì:
Ïåðåìíîæàÿ ðàâåíñòâî (21), (22) ñ ó÷åòîì (*),(8) è (9) ïîëó÷èì:
Ðàâåíñòâî (24) ñâèäåòåëüñòâóåò î òîì, ÷òî êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ îïðåäåëÿåòñÿ îòíîøåíèåì êîíöåíòðàöèé îäíîòèïíûõ íîñèòåëåé ïî ðàçíûå ñòîðîíû ïåðåõîäà, ÷òî ÿâëÿåòñÿ ïðÿìûì ñëåäñòâèåì ñòàòèñòèêè Ìàêñâåëëà Áîëüöìàíà â íåâûðàæäåííîì ïîëóïðîâîäíèêå.
.
Äëÿ ïðàêòè÷åñêèõ öåëåé óäîáíî ïîëüçîâàòüñÿ ñîîòíîøåíèåì (26), ïîçâîëÿþùèì âû÷èñëèòü êîíòàêòíóþ ðàçíîñòü ïîòåíöèàëîâ íåïîñðåäñòâåííî ÷åðåç êîíöåòðàöèè ëåãèðóþùèõ ïðèìåñåé.
Èç ðèñ. 1.4.1 âèäíî, ÷òî ïðè îòñóòñòâèè âûðîæäåíèÿ (êîãäà óðîâåü Ôåðìè ëåæèò â çàïðåùåííîé çîíå) âûñîòà ïîòåíöèàëüíîãî áàðüåðà íå ìîæåò ïðåâûøàòü øèðèíû çàïðåùåííîé çîíû Å.
Ïðè ýòîì:
Èç ðèñ. 1.4.1 âèäíî, ÷òî êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ óâåëè÷èâàåòñÿ ñ óâåëè÷åíèåì ëåãèðîâàíèÿ ýìèòòåðà è áàçû. Ïåðåõîäû, èçãîòîâëåííûå íà îñíîâå ïîëóïðîâîäíèêà ñ áîëüøîé øèðèíîé çàïðåùåííîé çîíû (è, ñëåäîâàòåëüíî, ìåíüøåé ñîáñòâåííîé êîíöåíòðàöèè íîñèòåëåé çàðÿäà ), èìåþò áîëüøóþ êîíòàêòíóþ ðàçíîñòü ïîòåíöèàëîâ.
Îñíîâíûì äîïóùåíèåì ïðè àíàëèçå ïåðåõîäà ÿâëÿåòñÿ ïåðåíåáðåæåíèå êîíöåíòðàöèÿìè ïðèìåñåé. Ïðè ýòîì ðàñïðåäåëåíèå ïëîòíîñòè îáúåìíîãî çàðÿäà îïèñûâàåòñÿ ñîîòíîøåíèåì:
Ýëåêòðè÷åñêîå ïîëå ìîæåò áûòü íàéäåíî èç óðàâíåíèÿ Ïóàññîíà:
Ïðè ýòîì êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ ðàâíà:
Ïîñêîëüêó ôóíêöèÿ ìåíÿåò çíàê â òî÷êå Õ=0, à íà ãðàíèöàõ ïåðåõîäà â ïîëå ðàâíî íóëþ - íàïðÿæåííîñòü ýëåêòðè÷åñêîãî ïîëÿ ñîñòàâëÿåò:
(30).
Óñëîâèå (30) ñîîòâåòñòóåò ýëåêòðè÷åñêîé íåéòðàëüíîñòè Ð-N ïåðåõîäà â öåëîì:
(31).
Óðàâíåíèå (26), (29) è (31) ìîãóò áûòü ðåøåíû îòíîñèòåëüíî íåèçâåñòíûõ è ïîñëå ÷åãî èç (30) îïðåäåëÿåòñÿ ìàêñèìàëüíîå ïîëå â Ð-N ïåðåõîäå.
Ðàñ÷åò ïàðàìåòðîâ ñóïåí÷àòîãî Ð-N ïåðåõîäà.
Íàèáîëåå ïðîñòî îïðåäåëÿþòñÿ ïàðàìåòðû ñòóïåí÷àòîãî Ð-N ïåðåõîäà, òàê êàê â ýòîì ñëó÷àå ôóíêöèè N(x) èìååò âèä:
à çíà÷åíèå ãðàíè÷íûõ óñëîâèé êîíöåíòðàöèé ïðèìåñè è èçâåñòíû:
(33);
(34).
Êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ îïðåäåëÿåòñÿ èç óðàâíåíèÿ (26):
(35);
Ïîäñòàâëÿÿ â (33), (26) è (29) ñ ó÷åòîì î÷åâèäíîãî ñîîòíîøåíèÿ ïîëó÷èì:
(36);
(37);
(39).
Ìàêñèìàëüíàÿ íàïðÿæåííîñòü ýëåêòðè÷åñêîãî ïîëÿ îïðåäåëÿåòñÿ èç (28):
(40).
Èç (36) ñëåäóåò, ÷òî ïðè óñëîâèè ïðàêòè÷åñêè âåñü ïåðåõîä ñîñðåäîòî÷åí â îáëàñòè áàçû ().
Ïîñêîëüêî âåëè÷èíà ñëàáî ëîãàðèôìè÷åñêè çàâèñèò îò êîíöåíòðàöèè ïðèìåñè â ýìèòòåðå, ïðè ïàðàìåòðû ïåðåõîäà îïðåäåëÿþòñÿ ïðàêòè÷åñêè òîëüêî ñâîéñòâîì áàçû:
(41);
(42).
1.6 Ñïèñîê îñíîâíûõ îáîçíà÷åíèé
- êîíöåíòðàöèÿ àêöåïòîðíîé (äîíîðíîé) ïðèìåñè;
- ðåçóëüòèðóþùàÿ êîíöåíòðàöèÿ ïðèìåñè;
- àáñîëþòíàÿ âåëè÷èíà ðåçóëüòèðóþùåé ïðèìåñè â ýìèòòåðå (áàçå);
- ñîáñòâåííàÿ êîíöåíòðàöèÿ íîñèòåëåé çàðÿäà;
- êîíöåíòðàöèÿ ýëåêòðîíîâ â n(p) îáëàñòè;
- êîíöåíòðàöèÿ äûðîê â p (n) îáëàñòè;
- ðàâíîâåñíàÿ êîíöåíòðàöèÿ ýëåêòðîíîâ â p (n) îáëàñòè;
- ðàâíîâåñíàÿ êîíöåíòðàöèÿ äûðîê â p (n) îáëàñòè;
- èçáûòî÷íàÿ êîíöåíòðàöèÿ ýëåêòðîíîâ â n (p) îáëàñòè;
- èçáûòî÷íàÿ êîíöåíòðàöèÿ äûðîê â p (n) îáëàñòè;
F - ýíåðãèÿ Ôåðìè;
- íàïðÿæåííîñòü ýëåêòðè÷åñêîãî ïîëÿ;
- ýëåêòðè÷åñêèé ïîòåíöèàë;
- òåìïåðàòóðíûé ïîòåíöèàë;
- êîíòàêòíàÿ ðàçíîñòü ïîòåíöèàëîâ;
U - íàïðÿæåíèå;
I - òîê;
j - ïëîòíîñòü òîêà;
- ïîäâèæíîñòü ýëåêòðîíîâ (äûðîê);
- êîýô. äèôôóçèè ýëåêòðîíîâ (äûðîê);
- âðåìÿ æèçíè ýëåêòðîíîâ (äûðîê);
- äèôôóçèîííàÿ äëèíà ýëåêòðîíîâ (äûðîê);
- äåáàåâñêàÿ äëèíà ýêðàíèðîâàíèÿ;
l - øèðèíà p-n ïåðåõîäà.
1.7 Îñíîâíûå ôèçè÷åñêèå êîíñòàíòû è ïàðàìåòðû ïîëóïðîâîäíèêîâûõ ìàòåðèàëîâ
1.8 Ðàñ÷åòíàÿ ÷àñòü
Ðàñ÷èòàòü ìàêñèìàëüíóþ íàïðÿæåííîñòü Ð-N ïåðåõîäà äëÿ ñëó÷àÿ:
; ; ; ; ; Ê;
.
Èñïîëüçóåì óðàâíåíèå ,
ãäå: k - ïîñòîÿííàÿ Áîëüöìàíà ;
Ò - àáñîëþòíàÿ òåìïåðàòóðà;
å - çàðÿä ýëåêòðîíà .
.
; .
;
.
2. Ôèçèêî-õèìè÷åñêèå ïðîöåññû èîííî-ïëàçìåíîãî ïîëó÷åíèÿ ïëåíîê.
Èîííî-ïëàçìåííûå ìåòîäû ïîëó÷åíèÿ ïëåíîê â ïîñëåäíèå äåñÿòèëåòèå ïîëó÷èëè øèðîêîå ðàñïðîñòðàíåíèå â òåõíîëîãèè ÐÝÀ áëàãîäîðÿ ñâîåé óíèâåðñàëüíîñòè è ðÿäó ïðåèìóùåñòâ ïî ñðàâíåíèþ ñ äðóãèìè òåõíîëîãè÷åñêèìè ìåòîäàìè. Óíèâåðñàëüíîñòü ìåòîäîâ îïðåäåëÿåòñÿ òåì, ÷òî ñ èõ ïîìîùüþ ìîæíî îñóùåñòâèòü ðàçëè÷íûå òåõíîëîãè÷åñêèå ïðîöåññû: î÷èñòêó ïîäëîæåê, íàïûëåíèå ñëîåâ, òðàâëåíèå ñ öåëüþ ñîçäàíèÿ çàäàííîãî ðèñóíêà ÈÌÑ. Ê ïðåèìóùåñòâàì ìåòîäà îòíîñèòñÿ âîçìîæíîñòü ïðîâåäåíèÿ íàïûëåíèÿ è òðàâëåíèÿ ïðè íåâûñîêèõ òåìïåðàòóðàõ è áåç ïðèìåíåíèÿ æèäêèõ õèìè÷åñêèõ ðåàãåíòîâ è ðàñòâîðèòåëåé.
Îþû÷íî èñòî÷íèêîì áîìáàðäèðóþùèõ ÷àñòèö ñëóæèò ïëàçìà. Îíà ÿâëÿåòñÿ òåì “ðåàãåíòîì”, êîòîðûé îáåñïå÷èâàåò ïðîöåññû ðàñïûëåíèÿ è òðàâëåíèÿ ñëîåâ òâåðäîãî òåëà. Ðàññìîòðèì êðàòêî åå õàðàêòåðèñòèêè.
2.1 Õàðàêòåðèñòèêè ïëàçìû è åå ïàðàìåòðû.
Ïëàçìîé íàçûâàþò èîíèçèðîâàííûé ãàç, êîòîðûé ñîñòîèò èç òðåõ âèäîâ ÷àñòèö: èîíîâ, ýëåêòðîíîâ è íåéòðàëüíûõ àòîìîâ (ìîëåêóë). Ýëåêòðè÷åñêèå ñèëû, ñâÿçûâàÿ ðàçíîèìåííî çàðÿæåííûå ÷àñòèöû, îáåñïå÷èâàþò êâàçèíåéòðàëüíîñòü ïëàçìû. Ñîñòîÿíèå ïëàçìû, èñïîëüçóååìîé â òåõíîëîãè÷åñêèõ öåëÿõ, ìîæíî îïèñàòü ñ ïîìîùüþ óðàâíåíèé êëàññè÷åèêîé ôèçèêè, ïîñêîëüêó êâàíòîâûå ýôôåêòû â ýòîì ñëó÷àå íå èãðàþò çàìåòíîé ðîëè.  òàáëèöå 2.1.1 ïðåäñòàâëåíû îñíîâíûå ïàðàìåòðû ïëàçìû, âëèÿþùèå íà ïðîòåêàþùèå â íåé ïðîöåññû.
òàáëèöà 2.1.1.Ïàðàìåòðû ïëàçìû, âëèÿþùèå íà ïðîòåêàþùèå â íåé ôèçèêî-õèìè÷åñêèå ïðîöåññû
Ïëåíêè ïîëó÷àþò èííî-ïëàçìåííûì è ìàãíåòðîííûì ðàñïûëåíèÿìè. Âíà÷àëå ðàññìîòðèì ïîëó÷åíèå ïëåíîê ìàãíåòðîííûì ðàñïûëåíèåì.
2.2 Ïîëó÷åíèå ïëåíîê ìàãíåòðîííûì ðàñïûëåíèåì
Ñòðåìëåíèå îñóùåñòâèòü èîííî-ïëàçìåííûå ïðîöåññû â âûñîêîì âàêóóìå è ïîâûñèòü èõ ïðîèçâîäèòåëüíîñòü çà ñ÷åò ðîñòà ñêîðîñòåé ðàñïûëåíèÿ ïðèâåëî ê ñîçäàíèþ ìåòîäà ìàãíåòðîííîãî ðàñïûëåíèÿ. Ïðè ýòîì ýëåêòðîíû, ýìèòòèðóåìûå èç ìèøåíè ïàäàþùèìè èîíàìè, çàõâàòûâàþòñÿ ìàãíèòíûì ïîëåì è ïîä äåéñòâèåì åãî ñîâåðøàþò ñëîæíîå öèêëîèäàëüíîå äâèæåíèå ïî çàìêíóòûì òðàåêòîðèÿì âáëèçè ïîâåðõíîñòè ìèøåíè.
Ýòîò ìåòîä ðàñïûëåíèÿ ïîëó÷èë ñâîå íàçâàíèå îò ÑÂ× ïðèáîðîâ Ì-òèïà (ìàãíåòðîííûõ óñòðîéñòâ) èç-çà íàëè÷èÿ â ðàáî÷åé êàìåðå ñðåùåííûõ ýëåêòðè÷åñêîãî è ìàãíèòíîãî ïîëåé.
Áîëåå âûñîêàÿ ïëîòíîñòü ïîòîêà èîíîâ, ÷åì ïðè êàòîäíîì ðàñïûëåíèè, è áîëüøàÿ óäåëüíàÿ ìîùíîñòü, ðàññåèâàåìàÿ íà ìèøåíè, óâåëè÷èâàþò ñêîðîñòü ðàñïûëåíèÿ ìàòåðèàëà.
Äâèæåíèå çàðÿæåííûõ ÷àñòèö â ïëàçìå ïðè ìàãíåòðîííîì ðàñïûëåíèè ïîçâîëÿåò óñòàíîâèòü îñíîâíûå çàêîíîìåðíîñòè ýòîãî ìåòîäà ïîëó÷åíèÿ òîíêèõ ïëåíîê ðàçëè÷íûõ ìàòåðèàëîâ.
Îïèñàòüò òðàåêòîðèþ äâèæåíèÿ ýëåêòðîíîâ â ñêðåùåííûõ ýëåêòðè÷åñêîì è ìàãíèòíîì ïîëÿõ ìîæíî, ðàçëîæèâ ýòî äâèæåíèå íà äâå ñîñòàâëÿþùèå:äèôôóçèîííóþ è íàïðàâëåíóþ. Ïðåîáëàäàíèå òîé èëè èíîé ñîñòàâëÿþùåé çàâèñèò îò äàâëåíèÿ ãàçà ð è íàïðÿæåííîñòè ýëåêòðè÷åñêîãî ïîëÿ Å. Îòíîøåíèå Å/ð õàðàêòåðåçóåò äâèæåíèå ÷àñòèö.
Ýôôåêòèâíîñòü ðàáîòû ìàãíåòðîííîé ðàñïûëèòåëüíîé ñèñòåìû (ÌÐÑ) çàâèñèò îò ïðàâèëüíîãî âûáîðà ïàðàìåòðîâ ÒÏ è èõ ñòàáèëüíîñòè.
Îñíîâíûì òèïîì äâèæåíèÿ çàðÿæåííîé ÷àñòèöû â ïëîñêîñòè, ïåðïåíäèêóëÿðíûé ìàãíèòíîìó ïîëþ, ÿâëÿåòñÿ öèêëîòðîííîå âðàùåíèå.Ãëàâíûìè ïàðàìåòðàìè ýòîãî äâèæåíèÿ ÿâëÿþòñÿ: öèêëîòðîííûé ðàäèóñ âðàùåíèÿ ÷àñòèöû (ëàðìîðîâñêèé ðàäèóñ) rë, öèêëîòðîííàÿ ÷àñòîòà .
Ñîâìåñòíîå
äåéñòâèå
ýëåêòðè÷åñêîãî
è
ìàãíèòíîãî
ïîëåé
âûçûâàåò
äðåéô
çàðÿæåííîé
÷àñòèöû â
íàïðàâëåíèè,
ïåðïåíäèêóëÿðíîì
îáîèì
ïîëÿì.Òðàåêòîðèÿ
÷àñòèöû ïðè
äâèæåíèè
áåç
íà÷àëüíîé
ñêîðîñòè â
îäíîðîäíîì
ýëåêòðè÷åñêîì
è
ìàãíèòíîì
ïîëÿõ
ïðåäñòàâëÿåò
ñîáîé
öèêëîèäó. Â
ñêðåùåííûõ
ýëåêòðè÷åñêîì
è
ìàãíèòíûõ
ïîëÿõ ìîãóò
ñóùåñòâîâàòü
è äðóãèå
òèïû
äðåéôîâûõ
äâèæåíèé,
íàïðèìåð
ãðàäèåíòíîå
è
öåíòðîáåæíîå,
âûçûâàåìûå
íåîäíîðîäíîñòüþ
ìàãíèòíîãî
ïîëÿ è
èñêðèâëåíèåì
åãî ñèëîâûõ
ëèíèé.
Ñêîðîñòè
ýòèõ âèäîâ
äâèæåíèé
çàâèñÿò îò
ìàññû è
çàðÿäà
÷àñòèö, ÷òî
ïðèâîäèò ê
ðàçäåëåíèþ
çàðÿäîâ è
ïîÿâëåíèþ
òîêîâ.
Ñóìàðíàÿ
ñêîðîñòü
äâèæåíèÿ
çàðÿæåííîé
÷àñòèöû â
ìàãíèòíîì
ïîëåì ñ
èçîãíóòûìè
ñèëîâûìè
ëèíèÿìè
ñëàãàåòñÿ
èç
ñêîðîñòåé
ãðàäèåíòíîãî
è
öåíòðîáåæíîãî
äðåéôîâ.
 ÌÐÑ íåîäíîðîäíûìè ÿâëÿþòñÿ êàê ýëåêòðè÷åñêàÿ, òàê è ìàãíèòíîå ïîëÿ, ïîýòîìó â ïëàçìå ðàçðÿäà ñóùåñòâóþò âñå ïåðå÷èñëåííûå òèïû äðåéôîâûõ äâèæåíèé çàðÿæåííûõ ÷àñòèö.
Ïðè íèçêîì äàâëåíèè ðàçðÿä â ÌÐÑ ñ õîëîäíûì êàòîäîì ïîääåðæèâàåòñÿ òîëüêî çà ñ÷åò âòîðè÷íûõ ýëåêòðîíîâ, ýìèòòèðóåìûõ ñ êàòîäà â ðåçóëüòàòå èîííîé áîìáàðäèðîâêè. Âûáèòûå èç êàòîäà ýëåêòðîíû óñêîðÿþòñÿ â îáëàñòè òåìíîãî êàòîäíîãî ïðîñòðàíñòâà (ÒÊÏ) è ñ áîëüøèìè ýíåðãèÿìè âõîäÿò â îáëàñòü ïëàçìû, ãäå ñîâåðøàþò èîííèçèðóþùåå ñòîëêíîâåíèÿ ñ àòîìàìè ðàáî÷åãî ãàçà äî òåõ ïîð, ïîêà íå ïîòåðÿþò ýíåðãèþ èëè íå ïîïàäóò íà àíîä.
Êàê ïðàâèëî,
ó èîíîâ
áîëåå ÷åì íà
äâà ïîðÿäêà
âûøå, ÷åì ó
ýëåêòðîíîâ,
ïîýòîìó ïðè
èñïîëüçóåìûõ
â ÌÐÑ
ìàãíèòíûõ
ïîëÿõ è â
íåáîëüøîé
îáëàñòè
ñóùåñòâîâàíèÿ
ïëàçìû
ìàãíèòíîå
ïîëå
ïðàêòè÷åñêè
íå âëèÿåò íà
òðàåêòîðèþ
äâèæåíèÿ
èîíîâ,
êîòîðûå ïîä
äåéñòâèåì
ýëåêòðè÷åñêîãî
ïîëÿ
ñâîáîäíî
äâèæóòñÿ ê
ìèøåíè ïî
òðàåêòîðèÿì,
áëèçêèì ê
ïðÿìîëèíåéíûì.
Ýëåêòðîíû æå,
ïåðåìåùàÿñü
ïî ñëîæíûì
òðàåêòîðèÿì
â îáëàñòè
ìàãíèòíîé
ëîâóøêè,
ñîâåðøàþò
ìíîãîêðàòíûå
ñòîëêíîâåíèÿ
ðàáî÷åãîî
ãàçà.
Ñëåäîâàòåëüíî,
ñïðàâåäëèâî
ïðåäïîëîæèòü,
÷òî
îñíîâíóþ
ðîëü â
ïðîöåññàõ
îáðàçîâàíèÿ
è
ïîääåðæàíèÿ
ïëàçìû â
ìàãíåòðîííûõ
ðàñïûëèòåëüíûõ
ñèñòåìàõ
èãðàþò
ýëåêòðîíû.
Äëÿ óäîáñòâà
àíàëèòè÷åñêîãî
îïèñàíèÿ
òðàåêòîðèþ
ìîæíî
ñ÷èòàòü
öèêëîèäàëüíîé.
Ýäåêòðîí,
óñêîðàÿñü â
îáëàòñè
òåìíîãî
êàòîäíîãî
ïðîñòðàíñòâà
(ÒÊÏ) øèðèíîé
ïî
òðàåêòîðèè,
áëèçêîé ê
öèêëîèäàëüíîé,
óäàëÿåòñÿ îò
êàòîäà íà
ðàññòîÿíèå
è ïîïàäàåò â
îáëàñòü
ïëàçìû. Â
îáùåì
ñëó÷àå .
Åñëè
ñ÷èòàòü ýòè
âåëè÷èíû
áëèçêèìè ïî
çíà÷åíèþ, à
ýëåêòðè÷åñêîå
ïîëå â
îáëàñòè ÒÊÏ
äîñòàòî÷íî
îäíîðîäíûì,
òî , ò.å.
ýëåêòðîí
óäàëÿåòñÿ îò
êàòîäà íà
ðàññòîÿíèå
ëàðìîðîâñêèõ
ðàäèóñîâ.
Øèðèíó ÒÊÏ (2.2.1) ìîæíî ñ÷èòàòü ìàêñèìàëüíî âîçìîæíîé, ïîñêîëüêó â ýòîì ñëó÷àå ïðàêòè÷åñêè âñå ýëåêòðîíû ñ êàòîäà äâèæóòñÿ â îáëàñòè ÒÊÏ è íå çàõîäÿò â îáëàñòü îòðèöàòåëüíîãî ñâå÷åíèÿ ïëàçìû, ãäå îíè ýôôåêòèâíî èîíèçèðóþò ãàç. Ðåàëüíóþ øèðèíó ÒÊÏ ìîæíî ïðèáëèæåííî âûðàçèòü ÷åðåç ïëîòíîñòü èîííîãî òîêà ïî ôîðìóëå ×àéëäà-Ëåíãìþðà: (2.2.2),
ãäå - ìàññà èîíà, êã; - ïëîòíîñòü èîííîãî òîêà êàòîäà, .
Åñëè ýëåêòðîí íå ñòîëêíîòñÿ íà ñâîåì ïóòè ñ äðóãîé ÷àñòèöåé, òî îí âîçâðàùàåòñÿ ê êàòîäó è çàõâàòûâàåòñÿ èì. Âåðîÿòíîñòü çàõâàòà äîëæíà áûòü äîâîëüíî âûñîêé, ïîñêîëüêó äëèíà ñâîáîäíîãî ïðîáåãà ýëåêòðîíà çíà÷èòåëüíî áîëüøå äëèíû öèêëîèäû. Îäíàêî èç-çà âîëíîâûõ ïðîöåññîâ â ïëàçìå è íåîäíîðîäíîñòè ìàãíèòíîãî è ýëåêòðè÷åñêèõ ïîëåé âåðîÿòíîñòü çàõâàòà óìåíüøàåòñÿ è íå ïðåâûøàåò 0,5.
Ýëåêòðîíû, êîòîðûå ïîïàäàþò â ìàãíèòíóþ ëîâóøêó è íå âîçâðàùàþòñÿ íà êàòîä, ñîâåðøàþò èîíèçèðóþùåå ñòîëêíîâåíèÿ â ïëàçìå è ïåðåìåùàþòñÿ â ñòîðîíó àíîäà. Ïîñëå íåñêîëüêèõ ñòîëêíîâåíèé ýëåêòðîíû òåðÿþò ýíåðãèþ è äèôôóíäèðóþò ê àíîäó. Îáëàñòü ñóùåñòâîâàíèÿ ïëàçìû îãðàíè÷èâàåòñÿ ïðåäåëàìè, â êîòîðûõ ýëåêòðîíû òåðÿþò ñâîþ ýíåðãèþ. Ãðàíèöà ýòîé îáëàñòè â ðàçðÿäå ÌÐÑ ÿâëÿåòñÿ, ïî ñóùåñòâó, óñëîâíûì àíîäîì.
Ðåàëüíûé àíîä ÌÐÑ äîëæåí ðàñïîëîãàòüñÿ îò öåíòðà çîíû ðàñïûëåíèÿ íà ðàññòîÿíèè íå ìåíüøå ðàñòîÿíèÿ îò êàòîäà äî óñëîâíîãî àíîäà, òàê êàê â ïðîòèâíîì ñëó÷àå îí áóäåò çàõâàòûâàòü èç ìàãíèòíîé êàòóøêè ýëåêòðîíû, ñïîñîáíûå èîíèçèðîâàòü ãàç, â ðåçóëüòàòå ÷åãî ýôôåêòèâíîñòü ðàçðÿäà óìåíüøèòñÿ. Ïðè ïåðåôåðèéíîì ðàñïîëîæåíèè â ïëîñêèõ ÌÐÑ àíîä äîëæåí óñòàíàâëèâàòüñÿ âíå îáëàñòåé âõîäà è âûõîäà ñèëîâûõ ëèíèé ìàãíèòíîãî ïîëÿ.
Ëîêàëèçàöèÿ ïëàçìû àíîìàëüíîãî òëåþùåãî ðàçðÿäà ó ðàñïûëÿåìîé ïîâåðõíîñòè ìèøåíè ÿâëÿåòñÿ îäíîé èç îñîáåííîñòåé ÌÐÑ. Ïðè ýòîì ïëàçìà èìååò ôîðìó, áëèçêóþ ê òîðîèäàëüíîé; ñòåïåíü åå èîíèçàöèè ìàêñèìàëüíà â öåíòðàëüíîé ÷àñòè íàä çîíîé ðàñïûëåíèÿ. Ïðè÷èíà ëîêàëèçàöèè ïëàçìû îòíîñèòåëüíî ñðåäíåé ëèíèè çîíû ðàñïûëåíèÿ îáúÿñíÿåòñÿ íåîäíîðîäíîñòüþ ìàãíèòíîãî è ýëåêòðè÷åñêîãî ïîëåé.
Ôîðìèðîâàíèå
ïðîñòðàíñòâåííûõ
çàðÿäîâ
ïëàçìû â
ñêðåùåííûõ
ýëåêòðè÷åñêîì
è
ìàãíèòíîì
ïîëÿõ,
îáðàçóåìûõ
êîàêñèàëüíûìè
öèëèíäðè÷åñêèìè
ýëåêòðîäàìè,
è ñòðóêòóðà
ðàçðÿäà
çàâèñÿò îò
õàðàêòåðèñòèê
ìàãíèòíîãî
ïîëÿ. Ïðè
äîñòàòî÷íî
ñèëüíîì
ìàãíèòíîì
ïîëå ïî÷òè
âñå ïàäåíèå
íàïðÿæåíèÿ
ïðîèñõîäèò â
àíîäíîì
ñëîå.
Ýëåêòðîíû,
óñêîðÿÿñü â
ýòîé
îáëàñòè,
èîíèçèðóþò
àòîìû ãàçà,
â ðåçóëüòàòå
÷åãî
äîìèíèðóþùåé
îáëàñòüþ
èîíèçàöèè
ñòàíîâèòñÿ
ïðèàíîäíàÿ
îáëàñòü.
Òàêèì
îáðàçîì, ïðè
ñêðåùåííûõ
ýëåêòðîìàãíèòíûõ
ïîëÿõ ìîãóò
íàáëþäàòüñÿ
òðè òèïà
ðàçðÿäà â
çàâèñèìîñòè
îò
íàïðÿæåííîñòè
ìàãíèòíîãî
ïîëÿ: 1) Ðàçðÿä â
îáëàñòè
êàòîäíîãî
ïàäåíèÿ
ïîòåíöèàëà; 2)
ðàçðÿä â
îáëàñòè
àíîäíîãî
ïàäåíèÿ
ïîòåíöèàëà; 3)
ðàçðÿä ïðè
îäíîâðåìåííîì
ñóùåñòâîâàíèè
îáåèõ
îáëàñòåé.
Ïåðâûé òèï ðàçðÿäà íàáëþäàåòñÿ â îáû÷íûõ ðàñïûëèòåëüíûõ ñèñòåìàõ â ìàãíåòðîííûõ ñèñòåìàõ ñî ñëàáûì ìàãíèòíûìè ïîëÿìè (B=0,01-0,03 Òë). Îí õàðàêòåðèçóåòñÿ íàëè÷èåì ó êàòîäà îáëàñòè ñ ïîëîæèòåëüíûì ïðîñòðàíñòâåííûì çàðÿäîì. Èíäóêöèÿ ìàãíèòíîãî ïîëÿ, ïðè êîòîðîì âîçíèêàåò ýòîò òèï ðàçðÿäà, çàâèñèò îò êîíêðåòíîé ðàçðÿäíîé ñèñòåìû, ðàáî÷åãî äàâëåíèÿ è ðÿäà äðóãèõ ôàêòîðîâ.
Äëÿ ðàñïûëåíèÿ ìàòåðèàëà íàèáîëåå ýôôåêòèâåí ðàçðÿä ñ ïîëîæèòåëüíûì ïðîñòðàíñòâåííûì çàðÿäîì è êàòîäíûì ïàäåíèåì ïîòåíöèàëà. Ðàçðÿä ïðè îäíîâðåìåííîì ñóùåñòâîâàíèè êàòîäíîãî è çíà÷èòåëüíîãî àíîäíîãî ïîòåíöèàëîâ òàêæå ýôôåêòèâåí, ïîñêîëüêó îí îáåñïå÷èâàåò ðàâíîìåðíîå ðàñïðåäåëåíèå ïëîòíîñòè òîêà íà ðàñïûëÿåìîé ïîâåðõíîñòè ìèøåíè.
Âëèÿíèå ìàãíèòíîãî ïîëÿ è äàâëåíèÿ íà ðàçðÿä ñóùåñòâåííî.  îáû÷íûõ èîííî-ïëàçìåííûõ ðàñïûëèòåëüíûõ ñèñòåìàõ ðàñïûëåíèå âîçìîæíî ïðè äàâëåíèÿõ , ãäå - äëèíà ñâîáîäíîãî ïðîáåãà ýëåêòðîíà ïðè äàííîì äàâëåíèè.  ÌÐÑ ìàãíèòíîå ïîëå óâåëè÷èâàåò òðàåêòîðèþ äâèæåíèÿ ýëåêòðîíîâ â ìåæýëåêòðîäíîì ïðîìåæóòêå, à ñëåäîâàòåëüíî, âîçðàñòàåò è ÷èñëî ñòîëêíîâåíèé ñ àòîìàìè ðàáî÷åãî ãàçà.  ðåçóëüòàòå ýòîãî ðàçðÿä ñóùåñòâóåò ïðè áîëåå íèçêèõ äàâëåíèÿõ.
Òàêèì îáðàçîì, ìîæíî ñ÷èòàòü, ÷òî íàëîæåíèå ìàãíèòíîãî ïîëÿ ýêâèâàëåíòíî óâåëå÷åíèþ äàâëåíèÿ ãàçà.
Àíàëèç ôèçè÷åñêèõ ïðîöåññîâ, ïðîèñõîäÿùèõ â ÌÐÑ, ïîçâîëÿåò âûáðàòü îïòèìàëüíûå êîíñòðóêòèâíûå è òåõíîëîãè÷åñêèå õàðàêòêåðèñòèêè ýòèõ ñèñòåì. Íàèáîëåå ïîëíóþ èíôîðìàöèþ î ìåõàíèçìå ðàçðÿäà ìîæíî ïîëó÷èòü, ïîñòðîèâ ÂÀÕ ÌÐÑ (ðèñ.2.2.1).
Ðèñóíîê 2.2.1. ÂÀÕ ïëàíàðíîé ÌÐÑ; 1- ð=0,1 Ïà; 2 - ð=0,25 Ïà; 3 - ð=1,3 Ïà.
Êàê âèäíî èç ðèñóíêà 2.2.1, ÂÀÕ ÌÐÑ, ïîñòðîåííûå â ëîãàðèôìè÷åñêîì ìàñøòàáå, ïðåäñòàâëÿþò ñîáîé ëèíåéíûå çàâèñèìîñòè. Çíà÷èòåëüíîå îòêëîíåíèå îò ëèíåéíîñòè íàáëþäàåòñÿ ëèøü ïðè íèçêèõ äàâëåíèÿõ è íåáîëüøèõ èíäóêöèÿõ ìàãíèòíîãî ïîëÿ. Ýòî ÿâëÿåòñÿ ðåçóëüòàòîì óòå÷êè ýëåêòðîíîâ èç îáëàñòè ïëàçìû âñëåäñòâèè òîãî, ÷òî èõ öèêëîòðîííûé ðàäèóñ ïðè ñëàáûõ ìàãíèòíûõ ïîëÿõ ïðåâûøàåò ðàññòîÿíèå ìåæäó êàòîäîì è àíîäîì.
ÂÀÕ ðàçðÿäà â ÌÐÑ ìîæíî ýêñòðàïîëèðîâàòü âûðàæåíèåì I=K2(U-UÇ)2,(2.2.3)
ãäå K2 - êëýôôèöèåíò ïðîïîðöèîíàëüíîñòè; UÇ - íàïðÿæåíèå çàæèãàíèÿ ðàçðÿäà.
Çàâèñèìîñòü êîýôôåöèåíòà K2 îò ïàðàìåòðîâ ÌÐÑ â êàæäîì êîíòêðåòíîì ñëó÷àå îïðåäåëÿåòñÿ ýìïèðè÷åñêè. Ðàáî÷åå íàïðÿæåíèå ÌÐÑ çàâèñèò îò äàâëåíèÿ ð â íåé ðàáî÷åãî ãàçà è èíäóêöèè ìàãíèòíîãî ïîëÿ. Çàâèñèìîñòü ðàáî÷åãî íàïðÿæåíèÿ îò èíäóêöèè ìîæíî ïðåäñòàâèòü â âèäå:
U=K3Bn,(2.2.4)
ãäå K3 êîýôôèöèåíò ïðîïîðöèîíàëüíîñòè; n=-(1-2) äëÿ ñëàáûõ ìàãíèòíûõ ïîëåé è 0,3...0,5 äëÿ ñèëüíûõ. Ñòàáèëüíûé ðàçðÿä ñóùåñòâóåò â îáëàñòè îïðåäåëåííûõ çíà÷åíèèé B è ð; ×åì íèæå ð, òåì ïðè áîëüøèõ  ìîæåò ñóùåñòâîâàòü ðàçðÿä.
2.3 Ïîëó÷åíèå ïëåíîê èîííî-ïëàçìåííûì ðàñïûëåíèåì
Ðàçëè÷àþò äâà âèäà ðàñïûëåíèÿ:ôèçè÷åñêîå (êàòîäíîå) è õèìè÷åñêîå (ðåàêòèâíîå).Ôèçè÷åñêîå ðàñïûëåíèå ÿâëÿåòñÿ ðåçóëüòàòîì ñòîëêíîâåíèÿ ìåæäó ïàäàþùèì èîíîì è àòîìàìè ìèøåíè è çàâèñèò îò ýíåðãèè ïàäàþùèõ èîíîâ. Õèìè÷åñêîå ðàñïûëåíèå ïðîòåêàåò â òîì ñëó÷àå, êîãäà ðåàêöèîííîñïîñîáíûé èîí ïëàçìû îáðàçóåò ëåòó÷åå ñîåäèíåíèå ñ àòîìàìè èëè ìîëåêóëàìè ìèøåíè.  ýòîì ñëó÷àå ýíåðãèÿ ïàäàþùåãî èîíà íå èãðàåò ñóùåñòâåííîé ðîëè.
Äëÿ îïèñàíèÿ ïðîöåññîâ ôèçè÷åñêîãî ðàñïûëåíèÿ èñïîëüçóþò ìîäåëè, îñíîâàííûå íà äâóõ ìåõàíèçìàõ. Ñîãëàñíî ïåðâîìó ìåõàíèçìó ðàñïûëåííûå àòîìû âîçíèêàþò â ðåçóëüòàòå ñèëüíîãî ëîêàëüíîãî ðàçîãðåâà ïîâåðõíîñòè ìèøåíè ñàìèì ïàäàþùèì èîíîì(ìîäåëü “ãîðÿ÷åãî ïÿòíà”)èëè áûñòðîé âòîðè÷íîé ÷àñòèöåé(ìîäåëü “òåïëîâîãî êëèíà”). Âòîðîé ìåõàíèçì ñîñòîèò â ïåðåäà÷å èìïóëüñà ïàäàþùåãî èîíà àòîìàì ðåøåòêè ìàòåðèàëà ìèøåíè, êîòîðûå, â ñâîþ î÷åðåäü, ìîãóò ïåðåäàòü èìïóëüñ äðóãèì àòîìàì ðåøåòêè, âûçâàâ òåì ñàìûì êàñêàä ñòîëêíîâåíèé (ìîäåëü ñòîëêíîâåíèé).
 ñëó÷àå,
êîãäà
ïîâåðõíîñòíûé
àòîì
ïîëó÷èò
ýíåðãèþ,
äîñòàòî÷íóþ
äëÿ ðàçðûâà
ñâÿçè ñ
áëèæàéøèìè
ñîñåäÿìè, è
èìïóëüñ
áóäåò
íàïðàâëåí â
ñòîðîíó
ïðàâîé ôàçû,
àòîì ïåðåéäò
â ïðàâóþ
ôàçó. Ïðè
ýòîì
íàïðàâëåíèå
ïîëåòà
àòîìà
äîëæíî
ñîîòâåñòâîâàòü
íàïðàâëåíèþ
ïîëó÷åííîãî
èì èìïóëüñà.
Íå òðóäíî
ïîêàçàòü,
÷òî ýíåðãèÿ
òàêîãî
èìïóëüñà
íàèìåíüøàÿ,
åñëè îí
íîðìàëåí ê
ïîâåðõíîñòè
ìèøåíè.
Ýíåðãèÿ
àòîìà,
ïîêèäàþùåãî
ïîâåðõíîñòü
ìèøåíè è
ïåðåõîäÿùåãî
â ïàð, ðàâíà
èëè
ïðåâûøàåò
ýíåðãèþ
èñïàðåíèÿ è
ñîñòàâëÿåò
ëèøü ÷àñòü
ýíåðãèè
áîìáàðäèðóþùåé
÷àñòèöû,
êîòîðàÿ
òðàòèòñÿ â
îñíîâîíì íà
ðàäèîöèîííûå
ïîâðåæäåíèÿ
êðèñòàëè÷åñêîé
ðåøåòêè
ìèøåíè.
Êîëè÷åñòâåííîé õàðàêòåðèñòèêîé ïðîöåññà êàòîäíîãî ðàñïûëåíèÿ ÿâëÿåòñÿ êîýôôèöèåíò ðàñïûëåíèÿ ÊÏ, ðàâíûé êîëè÷åñòâó àòîìîâ âûáèòûõ ñ ïîâåðõíîñòè ìèøåíè îäíîé áîìáàðäèðóþùåé ÷àñòèöåé: (2.3.1), ãäå k - êîýôôèöèåíò õàðàêòåðèçóþùèé ôèçè÷åñêîå ñîñòîÿíèå ìèøåíè è îïðåäåëÿåìûé ýêñïåðèìåíòàëüíî; - ìàññà áîìáàðäèðóþùèõ èîíà è à àòîìà ìèøåíè, - ýíåðãèÿ èîíà.
Äëèíà ñâîáîäíîãî ïðîáåãà èîíà (2.3.2), ãäå - äèàìåòð ñå÷åíèÿ ñòîëêíîâåíèÿ èîíà è àòîìà, - êîíöåíòðàöèÿ àòîìîâ â ìèøåíè.
Çíà÷åíèå , ïîëó÷àåìîå èç óðàâíåíèÿ (2.3.1) õîðîøî ñîãëàñóåòñÿ ñ ýêñïåðèìåíòàëüíûìè äàííûìè.
Ðàññìîòðåííûé ìåõàíèçì âçàèìîäåéñòâèÿ ÷àñòèö ïîçâîëÿåò îáúÿñíèòü òàêèå ôàêòû, êàê ñóùåñòâîâàíèå ïîðîãîâîé ýíåðãèè èîíà (îáû÷íî íåñêîëüêî áîëüøåé ýíåðãèè èñïàðåíèÿ), íèæå êîòîðîé ðàñïûëåíèå íå ïðîèñõîäèò; çíà÷èòåëüíîå ïðåâûøåíèå ýíåðãèè ðàñïûëÿåìûõ àòîìîâ ýíåðãèè èñïàðÿåìûõ ÷àñòèö; íàèëó÷øåå ðàñïûëåíèå àòîìîâ âäîëü êðèñòàëëîãðàôè÷åñêîé ïëîñêîñòè ñ íàèáîëüøåé ïëîòíîñòüþ àòîìîâ; óìåíüøåíèå êîýôôèöèåíòà ïðè áîëüøèõ ýíåðãèÿõ áîèáàðäèðóþùèõ èîíîâ; îòñóòñòâèå ýëåêòðîííîãî ðàñïûëåíèÿ; íåçíà÷èòåëüíîå âëèÿíèå íà êîýôôèöèåíò ðàñïûëåíèÿ òåìïåðàòóðû ìèøåíè.
 òîì ñëó÷àå,
êîãäà
êîìïîíåíòû
ñïëàâà
ðàñïûëÿþòñÿ
èç ðàçíûõ
èñòî÷íèêîâ
ïðè îäíîé è
òîé æå
ýíåðãèè
èîíîâ,
ðåãóëèðîâàòü
ñîñòàâ
îñàæäåííîé
ïëåíêè
ìîæíî ïóòåì
ïîäáîðà
ïëîùàäåé
êàòîäîâ. Ïðè
ýòîì
îáåñïå÷èâàåòñÿ
ïîëó÷åíèå
ïëåíîê
çàäàííîãî
ñîñòàâà. Äëÿ
ðàñ÷åòà
ñîñòàâà
äâóõêîìïîíåíòíîãî
ñïëàâà
ìîæíî
âîñïîëüçîâàòüñÿ
ñëåäóþùèì
ñîîòíîøåíèåì:
(2.3.3), ãäå y - ÷èñëî
àòîìîâ
êîìïîíåíòà;
- ïëîùàäè
ìèøåíèé;
èíäåêñû 1 è 2
îòíîñÿòñÿ ê
êîìïîíåíòàì
ñïëàâà.
Ðåãóëèðîâàòü ñîñòàâ îñàæäàåìîé ïëåíêè ìîæíî è äðóãèì ñïîñîáîì, íàïðèìåð, èçìåíÿÿ íàïðÿæåíèå, ïðèëîæåííîå ê êàæäîìó êàòîäó. Êîìáèíèðóÿ îáà ñïîñîáà, ïîëó÷àþò ïëåíêè ìíîãîêîìïàíåíòíûõ ñïëàâîâ ïðàêòè÷åñêè ëþáîãî ñîñòàâà.
Äëÿ
ïîíèìàíèÿ
ôèçèêî-õèìè÷åñêèõ
ïðîöåññîâ,
ïðîòåêàþùèõ
ïðè
èîííî-ïëàçìåííîì
(êàòîäíîì)
ðàñïûëåíèè,
ðàññìîòðèì
çàâèñèìîñòü
êîýôôèöèåíòà
ðàñïûëåíèÿ
îò
ðàçëè÷íûõ
ïàðàìåòðîâ
ñîñòîÿíèÿ
ñèñòåìû. Êàê
âèäíî èç
ðèñóíêà 2.3.1,
ïîðîãîâûå
çíà÷åíèÿ
ðàçëè÷íûõ
ìàòåðèàëîâ
ìàëî
îòëè÷àþòñÿ
äðóã îò
äðóãà, íî ïðè
ýòîì
íàáëþäàåòñÿ
çàìåòíîå
ðàçëè÷èå â
ñêîðîñòè
ðîñòà
êîýôôèöèåíòà
ðàñïûëåíèÿ
ïðè
óâåëå÷åíèè
ýíåðãèè
èîíîâ. Äëÿ
ëåãêèõ
èîíîâ íå
âûñîêèõ
ýíåðãèé
êîýôôèöèåíò
ðàñïûëåíèÿ
ìåòàëëîâ
ïðîïîðöèîíàëåí
, äëÿ òÿæåëûõ -
. Ïðè âûñîêèõ
ýíåðãèÿõ
èîíîâ, êàê
îòìå÷àëîñü
ðàíåå,
ïðîèñõîäèò
èìïëàíòàöèÿ
è
êîýôôèöèåíò
ðàñïûëåíèÿ
óìåíüøàåòñÿ
(ðèñ. 2.3.2).
Õàðàêòåð
çàâèñèìîñòè
êîýôôèöèåíòà
ðàñïûëåíèÿ
îò óãëà
ïàäåíèÿ
èîíîâ
ïîêàçàí íà
ðèñóíêå 2.3.3. Èç
ðèñóíêà
âèäíî, ÷òî
ðàçëè÷íûå
ìàòåðèàëû
ìèøåíè
ïî-ðàçíîìó
ðåàãèðóþò
íà
èçìåíåíèå
óãëà
ïàäåíèÿ
èîíîâ,
ïðè÷åì ó
áîëåå
òóãîïëàâêèõ
ìåòàëëîâ (Ta, Mo, W)
ýòà
çàâèñèìîñòü
âûðàæàåò
ñëàáåå, ÷åì ó
ëåãêîïëàâêèõ
(Ag, Cu). Ïðè
îþëó÷åíèè
ìèøåíåé
èîíàìè
íèçêîé
ýíåðãèè
íàáëþäàåòñÿ
îáðàòíàÿ
çàêîíîìåðíîñòü.
Òàêèå
ñëîæíûå
çàâèñèìîñòè
óãëîâûõ
ðàñïðåäåëåíèé
ïëîòíîñòè
ðàñïûëÿåìîãî
ïó÷êà èîíîâ
ïîêà íå
ïîëó÷èëè
óäîâëåòâîðèòåëüíîãî
îáúÿñíåíèÿ
â îáùåé
òåîðèè
èîíîãî-ïëàçìåíîãî
(êàòîäíîãî)
ðàñïûëåíèÿ.
Çàâèñèìîñòü êîýôôèöèåíòà ðàñïûëåíèÿ îò òåìïåðàòóðû òàêæå ñëîæíà. Îíà îïðåäåëÿåòñÿ õàðàêòåðîì èçìåíåíèÿ ñòðóêòóð ìèøåíè ñ óâåëå÷åíèåì òåìïåðàòóðû. Íà ñòðóêòóðó ìèøåíè âëèÿåò îòæèã äåôåêòîâ. Îí âîñòàíàâëèâàåò ïîâðåæäåíèÿ êðèñòàëè÷åñêîé ðåøåòêè, ïðîèçâîäèìûå ïàäàþùèì èîíîì î òîãî, êàê â ýòî ìåñòî ïîïàäåò ñëåäóþùèé èîí. Ýòî óâåëå÷åíèå òåìïåðàòóðû ìîæåò ñíèæàòü çíà÷åíèå êîýôôèöèåíòà ðàñïûëåíèÿ.
Åñëè
ïîâûøåíèå
òåìïåðàòóðû
ðàñïûëÿåìîãî
ìåòàëëà
ïîâëè÷åò çà
ñîáîé
ôàçîâîå
ïðåâðàùåíèå
(íàïðèìåð, â
æåëåçå ïðè 1179 Ê
ÎÖÊ
ïåðåõîäèò â
ÃÖÊ), òî
õàðàêòåð
çàâèñèìîñòè
Êï îò
òåìïåðàòóðû
ìîæåò
èçìåíÿòüñÿ.
Òàê, ïðè
íàãðåâàíèè Fe
äî 1179Ê
êîýôôèöèåíò
Êï
óâåëè÷èâàåòñÿ
ñ ðîñòîì
òåìïåðàòóðû,
à ïîñëå 1179Ê
óìåíüøàåòñÿ.
Íà ðèñóíêå 2.3.4
ïîêàçàíà
çàâèñèìîñòü
êîýôôèöèåíòà
ðàñïûëåíèÿ
îò
òåìïåðàòóðû
ìèøåíè äëÿ
íåêîòîðûõ
ìåòàëëîâ.
Óãëîâîå
ðàñïðåäåëåíèå
ðàñïðåäåëåíèå
ðàñïðåäåëåíèÿ
÷àñòèö
÷àñòî èìååò
ïåðâîñòåïåííîå
çíà÷åíèå
äëÿ
òåõíîëîãèè
ïîëó÷åíèÿ
êà÷åñòâåííûõ
òîíêèõ
ïëåíîê
ðàçëè÷íûõ
ìàòåðèàëîâ.
 îòëè÷èå îò
èñïàðåíèÿ
óãëîâîå
ðàñïðåäåëåíèå
÷àñòèö ïðè
êàòîäíîì
ðàñïûëåíèè
íå
ïîä÷èíÿåòñÿ
çàêîíó
êîñèíóñà.
Áîëüøîå
÷èñëî
÷àñòèö
ðàñïûëÿåòñÿ
â
íàïðàâëåíèè,
ïàðàëëåëüíîì
ïîâåðõíîñòè
ìèøåíè
(“ïîäêîñèíóñíîå”
ðàñïðåäåëåíèå).
Òàêîå
ðàñïûëåíèå
õàðàêòåðíî
äëÿ ìèøåíåé
èç Fe è Mo,
êîòîðûå
èìåþò ÎÖÊ, è
íå
õàðàêòåðíî
äëÿ Ni è Pt,
èìåþùèõ ÃÖÊ.
Ïî ìåðå
âîçðàñòàíèÿ
ýíåðãèè
èîíîâ,
õàðàêòåð
ðàñïðåäåëåíèÿ
ìåíÿåòñÿ (èç
“ïîäêîñèíóñíîãî”
ñòàíîâèòñÿ
“íàäêîñèíóñíûì”),
ò.å. áîëüøåå,
÷åì ýòî
ñëåäóåò èç
çàêîíà
êîñèíóñà,
÷èñëî
÷àñòèö
íà÷èíàåò
ðàñïûëÿòñÿ â
íàïðàâëåíèè
áëèçêîì ê
íîðìàëè
ïîâåðõíîñòè
ìèøåíè.
Ïðè äàâëåíèÿõ íèæå 0.0133 Ïà êîýôôèöèåíò Êï ïðàêòè÷åñêè íå çàâèñèò îò äàâëåíèÿ è ñîñòàâà îñòàòî÷íûõ ãàçîâ è òîëüêî ïðè äàâëåíèÿõ âûøå 1.33 Ïà íà÷èíàåò ðåçêî óìåíüøàòüñÿ (ðèñóíîê 2.3.5.), ÷òî îáúÿñíÿåòñÿ îáðàçîâàíèåì íà ïîâåðõíîñòè ìèøåíè ïëîòíûõ àäñîðáèðîâàííûõ ñëîåâ, ïðåïÿòñòâóþùèõ ðàñïûëåíèþ ìàòåðèàëà ìèøåíè, à òàêæå âîçâðàòîì ðàñïûëåííûõ ÷àñòèö ê êàòîäó èç ñîóäàðåíèÿ ñ ÷àñòèöàìè ãàçà.
Ðèñóíîê 2.3.5.Çàâèñèìîìòü êîýôôèöèåíòà ðàñïûëåíèÿ Êï íèêåëÿ, áîìáàðäèðóåìîãî èîíàìè àðãîíà ñ ýíåðãèåé 150 ýÂ, îò äàâëåíèÿ ãàçà ð.
Êàê ïðàâèëî, â óñòàíîâêàõ èîííî-ïëàçìåííîãî ðàñïûëåíèÿ ðàáî÷àÿ êàìåðà îãðàíè÷åíà âàêóóìíîïëîòíûì êîëïàêîì. Äàâëåíèå â êàìåðå ïîääåðæèâàåòñÿ íà óðîâíå 1,33 Ïà. Ðàñòîÿíèå ìåæäó êàòîäîì è àíàîäîì ñ ðàñïîëîæåííûìè íà íåì ïîäëîæêàìè ñîñòàâëÿåò 1...15 ñì ïðè äèàìåòðå ýëåêòðîäîâ 5...50 ñì. Íàïðÿæåíèå ïîääåðæèâàåòñÿ 1...10 êÂ.
Ðàñïûëåíèå
ïðè íèçêîì
äàâëåíèè
èìååò
îïðåäåëåííûå
äîñòîèíñòâà:
äîñòèãàåòñÿ
áîëüøàÿ
÷èñòîòà
ïëåíêè çà
ñ÷åò
óìåíüøåíèÿ
çàõâàòà
àòîìîâ ãàçà,
óëó÷øàåòñÿ
àäãåçèÿ
ïëåíîê
áëàãîäàðÿ
áîëüøåé
ýíåðãèåé
ðàñïûëåííûõ
÷àñòèö,
óäàðÿþùèõñÿ
î ïîäëîæêó.
Îäíàêî ïðè
ïîíèæåíèè
äàâëåíèÿ
òåìíîå
ïðîòñðàíñòâî
â ðàçðÿäå
ðàñòÿãèâàåòñÿ
ðàçðÿä
ãàñíåò è
ðàñïûëåíèå
ïðåêðàùàåòñÿ.
Ïîýòîìó äëÿ
ïîääåðæàíèÿ
ðàçðÿäà è
îáåñïå÷åíèÿ
ðàñïûëåíèÿ
ïðè íèçêèõ
äàâëåíèÿõ
íåîáõîäèìû
ñïåöèàëüíûå
ìåðû. Äëÿ
ïîëó÷åíèÿ
ïëåíîê â
áîëåå
ãëóáîêîì
âàêóóìå ñ
öåëüþ
äîñòèæåíèÿ
áîëüøåé
÷èñòîòû
ïðèìåíÿþò
àïïàðàòû,
ïîçâîëÿþùèå
ïîääåðæèâàòü
ïëàçìó ïðè
äàâëåíèè 10-5...10-7
Ïà. Ïðè ýòîì
äëÿ
âîçáóæäåíèÿ
ïëàçìû
èñïîëüçóþò
ñïåöèàëüíûå
óñòðîéñòâà.
Ñòåïåíü ðàçðÿæåíèÿ äîëæíà îáåñïå÷èâàòü ðàâåíñòâî ñêîðîñòåé ðàñïûëåíèÿ è îñàæäåíèÿ, ïðè êîòîðîì ðàñïûëåííûå ÷àñòèöû íå áóäóò âîçâðàùàòüñÿ îáðàòíî ê êàòîäó âñëåäñòâèå ñîóäàðåíèÿ ñ ìîëåêóëàìè ãàçà.
Ñêîðîñòü èîííî-ïëàçìåíîãî ðàñïûëåíèÿ (îñàæäåíèÿ) v=CIKï (2.3.1), ãäå Ñ - ïîñòîÿííàÿ äàííîãî ïðîöåññà; I - èîííûé òîê.
Ïîñêîëüêó Êï çàâèñèò îò íàïðÿæåíèÿ ðàçðÿäà Uð, äàâëåíèå ãàçà Ð, ðàññòîÿíèå d ìåæäó ìåøåíüþ è ïîäëîæêîé, ïðèðîäû ðñïûëÿåìûõ èîíîâ è äðóãèõ ôàêòîðîâ, óðàâíåíèå (2.3.1) ìîæíî çàïèñàòü â âèäå: v=(C’IUp)/(Pd), ãäå Ñ’ - ýêñïåðèìåíòàëüíàÿ êîíñòàíòà, îòðàæàþùàÿ âëèÿíèå íåó÷òåííûõ ôàêòîðîâ.
Äëÿ îáåñïå÷åíèÿ âûñîêîé ñêîðîñòè ðàñïûëåíèÿ èîííûé òîê ñëåäóåò óâåëè÷èâàòü äî ìàêñèìàëüíî âîçâîæíîãî çíà÷åíèÿ. Èç-çà îãðàíè÷åíèÿ äîïóñòèìîé ìîùíîñòè íàïðÿæåíèå ìîæíî ïîâûñèòü òîëüêî çà ñ÷åò ïîâûøåíèÿ äàâëåíèÿ ãàçà, ÷òî ïðèâåäåò ê ðåçêîìó ñíèæåíèþ Êï. Ïîýòîìó äëÿ ïîâûøåíèÿ ñêîðîñòè ðàñïûëåíèÿ äàâëåíèÿ ãàçà íåîáõîäèìî ïîääåðæèâàòü íà òàêîì óðîâíå, ÷òîáû îíî ñîîòâåòñòâîâàëî äîñòàòî÷íî âûñîêîìó çíà÷åíèþ Êï. Ñîãëàñíî ðèñóíêó 2.3.5 ýòî äàâëåíèå ñîñòàâëÿåò 1.3 Ïà.
Íà ñêîðîñòü
îñàæäåíèÿ
âëèÿåò
ðàññòîÿíèå
ìåæäó
ïîäëîæêàìè è
êàòîäîì.
×òîáû
îáåñïå÷èòü
îñàæäåíèå
ìàêñèìàëüíîãî
êîëè÷åñòâà
ðàñïûëåííîãî
ìàòåðèàëà,
ïîäëîæêè
ñëåäóåò
ðàñïîëîãàòü
êàê ìîæíî
áëèæå ê
êàòîäó.
Îäíàêî ïî
ìåðå èõ
ñáëèæåíèÿ
èîííûé òîê
ðåçêî ïàäàåò
(äàæå åñëè
ïîäëîæêè íå
äîñòèãëè
ãðàíèöû
òåìíîãî
êàòîäíîãî
ïðîñòðàíñòâà)
è ñêîðîñòü
ðàñïûëåíèÿ
óìåíüøàåòñÿ.
äëÿ âûáîðà
îïòèìàëüíîãî
ðàñòîÿíèÿ
ìåæäó
ïîäëîæêîé è
êàòîäîì
ñóùåñòâóåò
èìïåðè÷åñêîå
ïðàâèëî,
ñîãëàñíî
êîòîðîìó
ýòî
ðàññòîÿíèå
äîëæíî áûòü â
äâà ðàçà
áîëüøå äëèíû
êðóêñîâà
òåìíîãî
ïðîñòðàíñòâà.
Ýêñïåðèìåíòàëüíî
óñòàíîâëåíî,
÷òî ÷èñëî
îñåâøèõ íà
ïîäëîæêå
àòîìîâ
ñîñòàâëÿåò 99;
96; 55; 10% îò îáùåãî
÷èñëà
ðàñïûëåííûõ
àòîìîâ ïðè
ñëåäóþùèõ
çíà÷åíèÿõ
ïðîèçâåäåíèÿ
Pd: 10-2; 10-1;1;10 Ïàñì.
Ïðè èîííî-ïëàçìåííîì ðàñïûëåíèè íàïðÿæåííîñòü ýëåêòðè÷åñêîãî ïîëÿ ïî êðàÿì êàòîäà óâåëè÷èâàåòñÿ, ÷òî ïðèâîäèò ê óñêîðåíèþ ðàñïûëåíèÿ ñ åãî êðàåâ è ñîîòâåòñòâóþùåìó ðîñòó òîëùèíû ïëåíîê íà ïåðèôåðèè ïîäëîæåê. ×òîáû èçáåæàòü ýòîãî, ïëîùàäü ìèøåíè äîëæíà áûòü çíà÷èòåëüíî áîëüøå ïëîùàäè ïîäëîæåê. Îáû÷íî îòíîøåíèå ýòèõ ïëîùàäåé ñîñòàâëÿåò 10:1. Ïðè ýòîì ìîæíî îáåñïå÷èòü ðàâíîìåðíîñòü òîëùåíû ïëåíîê îêîëî 1%. Ñêîðîñòü èííî-ïëàçìåííîãî ðàñïûëåíèÿ ïîääåðæèâàåòñÿ ðàâíîé 100 íì/ìèí.
Ñïèñîê ëèòåðàòóðû
1. ×åðíÿåâ Â.Í. Ôèçèêî-òåõíè÷åñêèå ïðîöåññû â òåõíîëîãèè ÐÝÀ. Ì.: Âûñø. øê., 1987.-376 ñ.
2. Åïèôàíîâ. Ôèçèêà òâåðäîãî òåëà.
3. Åàèôàíîâ. Ôèçè÷åñêèå îñíîâû ìèêðîýëåêòðîíèêè.
Ààÿÿ
éïÿÿ
a[1]ÿÿ
D ˆ#[1]ÿÿ
‡@[1]ÿÿ
j‑ÀF[1]ÿÿ
ò@e[1]ÿÿ
| @l[1]ÿÿ
”
Àˆ[1]ÿÿÈÿÿ
ÿÿ¼[1]G[1]MMd´ÿÿ
ÿÿ¼[1]G[1]MMd{[1]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdªxÿÿ
ÿÿ¼[1]G[1]MMd( xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdàxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdlxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd?xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdfxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd†xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
[1]ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMd&xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdË[1]xÿÿ
ÿÿ¼[1]G[1]MMd ´ÿÿ
ÿÿ¼[1]G[1]MMdÌxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd‚xÿÿ
ÿÿ¼[1]G[1]MMd9xÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMdCxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
[1]ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
[1]ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMd„xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdRxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdšxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdÔxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdÙxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd°xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd%xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd+xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdIxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
[1]ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd·xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdWxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdºxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd_xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdWxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd®xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMd#´ÿÿ
ÿÿ¼[1]G[1]MMdžxÿÿ
ÿÿ¼[1]G[1]MMd‑Œÿÿ
ÿÿ¼[1]G[1]MMdµxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdÍxÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd:[1]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd”xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
[1]ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMd¾xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd²xÿÿ
ÿÿ¼[1]G[1]MMd#Œÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd!xÿÿ
ÿÿ¼[1]G[1]MMdóxÿÿ
ÿÿ¼[1]G[1]MMd+Œÿÿ
ÿÿ¼[1]G[1]MMdpxÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMdÕxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd[1]xÿÿ
ÿÿ¼[1]G[1]MMd+xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd*´ÿÿ
ÿÿ¼[1]G[1]MMdßxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd?xÿÿ
ÿÿ¼[1]G[1]MMdw xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdoxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd¢xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdˆxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdZxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd¼xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd9xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdIxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd`xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdµ[1]xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdQxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd#[1]xÿÿ
ÿÿ¼[1]G[1]MMd-´ÿÿ
ÿÿ¼[1]G[1]MMdPxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd3xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdQxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd@xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd\xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdUxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd1xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdCxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdfxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdÚxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd@xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd2xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdsxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdTxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdNxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdâxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd3xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdIxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdGxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd
xÿÿ ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdNxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd)xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd7xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdFxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdExÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd ´ÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd0xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd(xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdAxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd.xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd+xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd'xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd8xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd3xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd7xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdExÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd&xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdQxÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd#xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd&xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd#xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd*xÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd=xÿÿ
ÿÿ¼[1]G[1]MMdK´ÿÿ
ÿÿ¼[1]G[1]MMd´ÿÿ
ÿÿ¼[1]G[1]MMd´ÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMd´ÿÿ
ÿÿ¼[1]G[1]MMd?Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd#Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd8Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMd ´ÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdBÈÿÿ
ÿÿ¼[1]G[1]MMd
Œ´ ÿÿ¼[1]G[1]MMd*´ÿÿ
ÿÿ¼[1]G[1]MMd xÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdõŒ´
ÿÿ¼[1]G[1]MMdYŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdˆŒ´
ÿÿ¼[1]G[1]MMd-´´
ÿÿ¼[1]G[1]MMd Œ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd% Œÿÿ
ÿÿ¼[1]G[1]MMd*[1]Œ´
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdÆŒÿÿ
ÿÿ¼[1]G[1]MMd:Œ´
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdKŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd-Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdoŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdVŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdAŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd
Œÿÿ ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd"Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdg
Œÿÿ ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMds[1]Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMd Œÿÿ
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdKŒ´
ÿÿ¼[1]G[1]MMdÖŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMd Œ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
[1]ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMd$Œ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMd=Œ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMd
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
ÿÿ¼[1]G[1]MMdŒ´
[1]ÿÿ¼[1]G[1]MMd
Œ´ ÿÿ¼[1]G[1]MMd[1]Œ´
ÿÿ¼[1]G[1]MMdÝŒ´
ÿÿ¼[1]G[1]MMd1´´
ÿÿ¼[1]G[1]MMd3Œ´
ÿÿ¼[1]G[1]MMd`Œÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdWŒÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
ÿÿ¼[1]G[1]MMdIŒÿÿ
ÿÿ¼[1]G[1]MMd!Œ´
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Table 2.5
Hî‹ãÓY [1][1]ÿÿÿÿÿÿ
[1]ÿÿÿÿÎ8î
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Ï‹$Ìèíèñòåðñòâî îáùåãî è ïðîôåññèîíàëüíîãî îáðàçîâàíèÿ ÐÔ
Îðëîâñêèé Ãîñóäàðñòâåííûé Òåõíè÷åñêèé Óíèâåðñèòåò
Êàôåäðà «Ôèçèêè»
Êóðñîâàÿ ðàáîòà
ïî êóðñó:
«Ôèçè÷åñêèå îñíîâû ìèêðîýëåêòðîíèêè»
Âûïîëíèë ñòóäåíò: ÕàðèòîíîâÌ.Â.
ãðóïïà: 21-Ð
Ðóêîâîäèòåëü:
Îð¸ë 1998 ã.h[1]´ÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMdŒÿÿ
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ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd [1]´ÿÿ
ÿÿ¼[1]G[1]MMdxÿÿ
ÿÿ¼[1]G[1]MMd$ ðÿÿ
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1.1 Ïîíÿòèå î Ð-N ïåðåõîäå 3
1.2 Ñòðóêòðóðà P-N ïåðåõîäà. 5
1.3. Ìåòîäû ñîçäàíèÿ Ð-N ïåðåõîäîâ. 9
1.4 Ýíåðãåòè÷åñêàÿ äèàãðàììà Ð-N ïåðåõîäà. 12
1.5 Ìåòîäèêà ðàñ÷åòà ïàðàìåòðîâ P-N ïåðåõîäà. 16
1.6 Ñïèñîê îñíîâíûõ îáîçíà÷åíèé 19
1.7 Îñíîâíûå ôèçè÷åñêèå êîíñòàíòû è ïàðàìåòðû ïîëóïðîâîäíèêîâûõ ìàòåðèàëîâ 20
2. Ôèçèêî-õèìè÷åñêèå ïðîöåññû èîííî-ïëàçìåíîãî ïîëó÷åíèÿ ïëåíîê. 21
2.1 Õàðàêòåðèñòèêè ïëàçìû è åå ïàðàìåòðû. 22
2.2 Ïîëó÷åíèå ïëåíîê ìàãíåòðîííûì ðàñïûëåíèåì 22
2.3 Ïîëó÷åíèå ïëåíîê èîííî-ïëàçìåííûì ðàñïûëåíèåì 28
Ñïèñîê ëèòåðàòóðû 34
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«Ôèçè÷åñêèå îñíîâû ìèêðîýëåêòðîíèêè»
Âûïîëíèë ñòóäåíò: Åñèí Å.À.
ãðóïïà: 21-Ð
Ðóêîâîäèòåëü:
Îð¸ë 1998
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